Nano-Lithography - KTH
Nano-Lithography - KTH
Nano-Lithography - KTH
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• <strong>Nano</strong>-scale devices<br />
• Basics of optical lithography<br />
• Advanced optical lithography<br />
• <strong>Nano</strong>-lithography for low volume applications<br />
– Electron Beam <strong>Lithography</strong><br />
– <strong>Nano</strong> Imprint <strong>Lithography</strong><br />
– Sidewall Transfer <strong>Lithography</strong><br />
• Summary<br />
Per-Erik Hellstöm, Docent Lecture 14 th of February 2006<br />
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