Nano-Lithography - KTH
Nano-Lithography - KTH
Nano-Lithography - KTH
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Sidewall Transfer <strong>Lithography</strong> Process<br />
Cross Section<br />
Top view<br />
Resist<br />
Si 0.2 Ge 0.8<br />
poly-Si<br />
SiO 2<br />
Wafer<br />
Per-Erik Hellstöm, Docent Lecture 14 th of February 2006<br />
25