Nano-Lithography - KTH

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Sidewall Transfer <strong>Lithography</strong> Process SiN Resist poly-Si SiO 2 Wafer Cross Section Top view Per-Erik Hellstöm, Docent Lecture 14 th of February 2006 28
Sidewall Transfer <strong>Lithography</strong> Process SiN Resist poly-Si SiO 2 Wafer Cross Section Top view Per-Erik Hellstöm, Docent Lecture 14 th of February 2006 29
Page 1 and 2: Nano-Lithography -Patterning techni
Page 3 and 4: • Nano-scale devices • Basics o
Page 5 and 6: Nano-wires in sensor application EK
Page 7 and 8: Lithography specifications Resoluti
Page 9 and 10: Projection Lithography Intensity at
Page 11 and 12: Projection Lithography Light source
Page 13 and 14: Shorter wavelength R = k 1 λ NA λ
Page 15 and 16: Reduce resolution factor k 1 Resist
Page 17 and 18: Minimum feature size Production 200
Page 19 and 20: • Nano-scale devices • Basics o
Page 21 and 22: Resolution of EB lithography • Hi
Page 23 and 24: Nano Imprint Lithography • Step a
Page 25 and 26: Sidewall Transfer Lithography Proce
Page 27: Sidewall Transfer Lithography Proce
Page 31 and 32: Sidewall Transfer Lithography Proce
Page 33 and 34: Sidewall Transfer Lithography Line
Page 35: Summary Ideal Advanced Optical Elec

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