Nano-Lithography - KTH
Nano-Lithography - KTH
Nano-Lithography - KTH
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Summary<br />
Ideal<br />
Advanced<br />
Optical<br />
Electron<br />
Beam<br />
<strong>Nano</strong><br />
Imprint<br />
Sidewall<br />
Transfer<br />
Resolution<br />
Good<br />
Good<br />
Good<br />
Good<br />
Good<br />
Pattern shape<br />
Any<br />
Any<br />
Any<br />
Any<br />
Lines/<br />
Rings<br />
Large & small<br />
patterns<br />
Yes<br />
Yes<br />
No<br />
Yes<br />
Yes<br />
Alignment<br />
Good<br />
Good<br />
Good<br />
Poor<br />
Good<br />
Throughput<br />
High<br />
High<br />
Low<br />
Medium<br />
High<br />
Initial cost<br />
Low<br />
High<br />
Medium<br />
Low<br />
Low<br />
Running cost<br />
Low<br />
High<br />
Low<br />
Medium<br />
Low<br />
Per-Erik Hellstöm, Docent Lecture 14 th of February 2006<br />
35
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