Nano-Lithography - KTH
Nano-Lithography - KTH
Nano-Lithography - KTH
SHOW LESS
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Resolution of EB lithography<br />
• High Energy 100 keV<br />
• High contrast resist<br />
• Thin resist<br />
– Resist stack<br />
– Hard mask<br />
Thin resist<br />
Hard Mask<br />
Thick resist<br />
Wafer<br />
Wafer<br />
Per-Erik Hellstöm, Docent Lecture 14 th of February 2006<br />
21
Change language