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Ferromagnetic (Ga,Mn)As Layers and ... - OPUS Würzburg

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32 3. MBE Growth of <strong>Ferromagnetic</strong> (<strong>Ga</strong>,<strong>Mn</strong>)<strong>As</strong> <strong>Layers</strong><br />

Figure 3.4: Nomarski interference microscope images of common crystal defects visible on<br />

a (<strong>Ga</strong>,<strong>Mn</strong>)<strong>As</strong> surface. (a) cross-hatches, (b) disrupted crystal growth due to <strong>Ga</strong> spitting, <strong>and</strong><br />

two kinds of oval defects. Type α (c) contains no macroscopic core particulate, in contrast<br />

to type β (d).<br />

be seen in Fig. 3.4 (b), these areas can extend over several hundreds of micrometers.<br />

Especially large areas are visible by the naked eye as milky, circular spots. While this<br />

defect has no influence beyond the affected area, care has to be taken to avoid such<br />

sample pieces for processing or measurement.<br />

A class of much smaller defects are the oval defects, named for their appearance<br />

as oval surface pits, with their long axis aligned along either [110] or [1¯10]. <strong>As</strong> first<br />

classified by K. Fujiwara et. al. [Fuji 87], there are two major types of oval defects.<br />

The α type lacks a macroscopic core particulate, while the β type contains a visible<br />

core particulate. Fig. 3.4 (c) <strong>and</strong> (d) show α <strong>and</strong> β type oval defects observed on our<br />

(<strong>Ga</strong>,<strong>Mn</strong>)<strong>As</strong> samples. The size of both types increases with total grown layer thickness,<br />

which leads to the conclusion that the origin of this defect lies at the substrate/layer<br />

interface, most likely in the form of carbon contaminations. The density of oval defects

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