Optical Coatings

More documents

Recommendations

Info

Fundamental Optics Material Properties Optical Specifications Gaussian Beam Optics Calcium Fluoride Calcium fluoride (CaF 2 ), a cubic single-crystal material, has widespread applications in the ultraviolet and infrared spectra. CaF 2 is an ideal material for use with excimer lasers. It can be manufactured into windows, lenses, prisms, and mirror substrates. CaF 2 transmits over the spectral range of about 130 nm to 10 mm as shown in figure 4.7. Traditionally, it has been used primarily in the infrared, rather than in the ultraviolet. CaF 2 occurs naturally and can be mined. It is also produced synthetically using the Stockbarger method, which is a time- and energy-consuming process. Unfortunately, achieving acceptable deep ultraviolet transmission and damage resistance in CaF 2 requires much greater material purity than in the infrared, and it completely eliminates the possibility of using mined material. To meet the need for improved component lifetime and transmission at 193 nm and below, manufacturers have introduced a variety of inspection and processing methods to identify and remove various impurities at all stages of the production process, from incoming materials through crystallization. The needs for improved material homogeneity and stress birefringence have also caused producers to make alterations to the traditional Stockbarger approach. These changes allow tighter temperature control during crystal growth, as well as better regulation of vacuum and annealing process parameters. Excimer-grade CaF 2 provides the combination of deep ultraviolet transmission (for 193 nm and even 157 nm), high damage threshold, resistance to color center formation, low fluorescence, high homogeneity, and low stress birefringence characteristics required for the most demanding deep ultraviolet applications. CALCIUM FLUORIDE CONSTANTS Density: 3.18 gm cm 43 @ 25ºC Poisson Ratio: 0.26 dN/dT: 410.6!10 46 /ºC Young’s Modulus: 1.75!10 7 psi Coefficient of Linear Expansion: 18.9!10 46 /ºC (from 20ºC to 60ºC) Melting Point: 1360ºC Refractive Index of Calcium Fluoride Wavelength Refractive Index (mm) n 0.193 1.501 0.248 1.468 0.257 1.465 0.266 1.462 0.308 1.453 0.355 1.446 0.486 1.437 0.587 1.433 0.65 1.432 0.7 1.431 1.0 1.428 1.5 1.426 2.0 1.423 2.5 1.421 3.0 1.417 4.0 1.409 5.0 1.398 6.0 1.385 7.0 1.369 8.0 1.349 WAVELENGTH IN MICROMETERS Optical Coatings PERCENT TRANSMITTANCE 100 80 60 40 20 0 .2 .4 .6 .8 1.0 2 4.0 10 Figure 4.7 External transmittance for calcium fluoride 4.18 1 Visit Us OnLine! www.mellesgriot.com
Optical Coatings 5 Optical Coatings 5.2 OEM and Special Coatings 5.3 The Reflection of Light 5.4 Single-Layer Antireflection Coatings 5.8 Multilayer Antireflection Coatings 5.12 Thin-Film Production 5.14 Single-Layer MgF 2 Antireflection Coatings 5.17 HEBBAR Coatings 5.18 V-Coatings 5.23 High-Reflection Coatings 5.24 Metallic High-Reflection Coatings 5.25 Dielectric High-Reflection Coatings 5.29 MAXBRIte Coatings 5.33 Laser-Line MAX-R Coatings 5.35 Ultrafast Coating 5.37 5.1 1 Fundamental Optics Gaussian Beam Optics Optical Specifications Material Properties Optical Coatings
Page 1 and 2:
Fundamental Optics 1 Introduction 1
Page 3 and 4:
Paraxial Formulas SIGN CONVENTIONS
Page 5 and 6:
object F 2 Figure 1.4 image Example
Page 7 and 8:
Figure 1.6 Figure 1.7 f f 2 object
Page 9 and 10:
Figure 1.8 Figure 1.9 INDIVIDUAL EL
Page 11 and 12:
Performance Factors After paraxial
Page 13 and 14:
third-order, monochromatic, spheric
Page 15 and 16:
Positive lens elements usually have
Page 17 and 18:
Lens Shape Aberrations described in
Page 19 and 20:
ay f-numbers 2.7 3.3 4.4 6.7 13.3 S
Page 21 and 22:
AIRY DISC DIAMETER = 2.44 l f/# Fig
Page 23 and 24: Lens Selection Having discussed the
Page 25 and 26: Example 4: Diffraction-Limited Perf
Page 27 and 28: Aberration Balancing To improve sys
Page 29 and 30: Definition of Terms FOCAL LENGTH (f
Page 31 and 32: infinity (which is a comfortable vi
Page 33 and 34: For symmetric lenses (r 2 = 4r 1 ),
Page 35 and 36: Separation of Nodal Point from Corr
Page 37 and 38: Gaussian Beam Optics 2 Introduction
Page 39 and 40: Even if a Gaussian TEM 00 laser-bea
Page 41 and 42: eam expander INCORPORATING M 2 INTO
Page 43 and 44: M 2 AND THE LENS EQUATION For real-
Page 45 and 46: employed when laser power must be c
Page 47 and 48: Figure 2.13 Keplerian beam expander
Page 49 and 50: Optical Specifications 3 Wavefront
Page 51 and 52: Centration The mechanical axis and
Page 53 and 54: PERFECT RECTANGULAR LENS The MDMTF
Page 55 and 56: The permissible number of maximum-s
Page 57 and 58: Material Properties 4 Material Prop
Page 59 and 60: Introduction Glass manufacturers pr
Page 61 and 62: maximum value for homogeneity withi
Page 63 and 64: Melles Griot Lens Materials Melles
Page 65 and 66: Refractive Index of Five Schott Gla
Page 67 and 68: Synthetic Fused Silica Fused silica
Page 69 and 70: PERCENT INTERNAL TRANSMITTANCE 99.9
Page 71 and 72: Low-Expansion Borosilicate Glass Th
Page 73: ZERODUR ® Many optical application
Page 77 and 78: OEM and Special Coatings Melles Gri
Page 79 and 80: PERCENT REFLECTANCE 100 90 80 70 60
Page 81 and 82: will depend on the ratio of optical
Page 83 and 84: v = angle of incidence PERCENT REFL
Page 85 and 86: PERCENT REFLECTANCE PER SURFACE 2.0
Page 87 and 88: Two-Layer Coatings of Arbitrary Thi
Page 89 and 90: ION-ASSISTED BOMBARDMENT Ion-assist
Page 91 and 92: Single-Layer MgF 2 Antireflection C
Page 93 and 94: PERCENT REFLECTANCE 5 4 3 2 1 norma
Page 95 and 96: EXTENDED-RANGE HEBBAR ANTIREFLECTIO
Page 97 and 98: V-Coatings V-coatings are multilaye
Page 99 and 100: Metallic High-Reflection Coatings W
Page 101 and 102: INTERNAL SILVER (/036) $ For intern
Page 103 and 104: Dielectric High-Reflection Coatings
Page 105 and 106: PERCENT REFLECTANCE 100 80 60 40 20
Page 107 and 108: MAXBRIte Coatings MAXBRIte (multi
Page 109 and 110: Laser-Line MAX-R Coatings These mu
Page 111 and 112: Ultrafast Coating Melles Griot has
show all

Optical Coatings

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?