Overcoming the Challenges of Parallel RF Test - Semiconductor ...

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RF Calibration What is it? • Probes have electrical loss. • Measurements include the loss. a 0 b 1 1 Γ m ED E R ES b 0 a 1 Γ a • Calibration: – Characterize the transmission path. – Remove (de-embed) the loss from the measurements. Measurement Probe Loss E D : Directivity E S : Source Match E R : Frequency Tracking Actual Result • Scalar Calibration: – Magnitude loss only. • Vector Calibration: – Magnitude and phase. Γ m = E D ERΓa + 1− E Γ S a June 8 to 11, 2008 IEEE SW Test Workshop 14
• Measure 4 standards: – Short – Open – Load (50 ohms) – Thru path between ports. Vector RF Calibration 2-port techniques • Disadvantages: – Probe standards. – Standards must match probe topology. – VNA software required. – Difficult to integrate within an ATE environment. – Vector calibration usually not required for KGD test. (A) 1ps thru path, 200um length Shorting bars 50 ohm GSG loads June 8 to 11, 2008 IEEE SW Test Workshop 15
Page 1 and 2: Roger Hayward Cascade Microtech Ove
Page 3 and 4: The Challenges Decrease the cost to
Page 5 and 6: • Known Good Die RF Test: The Cha
Page 7 and 8: Roadblocks • RF Calibration • R
Page 9 and 10: Roadblock #2 Are you measuring your
Page 11 and 12: Roadblock #3 Have you fully-optimiz
Page 13: Clearing the Obstacles • RF Calib
Page 17 and 18: Scalar RF Calibration Measure Short
Page 19 and 20: Clearing the Obstacles Cater your s
Page 25 and 26: Pyramid Accel Concept Enabling Para
Page 27 and 28: Pyramid Accel Fixture Enabling Para
Page 29: Summary Thank You! June 8 to 11, 20

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