confidential - EUFANET

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$Low frequency noise $1/f and RTS$ in submicron MOSFETs - Free$

LASER ABLATION Regular LASER access today: 1. Generate a cavity (pocket) in EMC (100µm to 200µm remaining EMC above chip). 2. Opening is finished with a final acid touch (wet) or with plasma (dry). LASER 1064 nm RESIN ABLATION
PICTURE SUPERIMPOSITION jpeg PICTURE
Page 1 and 2: LASER Chip Access in 3D ICs … …
Page 3 and 4: Why open a component? § Now, you h
Page 5 and 6: AGENDA -Why open a component? - - 4
Page 7 and 8: Papers about these techniques • E
Page 9 and 10: ACID § § § § § Drop technique
Page 11 and 12: Temperature … 255°C 85°C 75°C
Page 13: AGENDA - - - Why open a component?
Page 17 and 18: AGENDA - - - Why open a component?
Page 19 and 20: A : LASER Ablation • STEP 1 : Pla
Page 21 and 22: CONFIDENTIAL C : Plasma O2/CF4 •
Page 23 and 24: Step C & D repeats Plasma for 15mn
Page 25 and 26: AGENDA - - - Why open a component?
Page 27 and 28: Mechanical : Milling … a 3D dream
Page 29 and 30: AGENDA - - Why open a component? 4
Page 31 and 32: LASER / Acid … Goal: Reach both d
Page 33 and 34: LASER / Plasma / Acid … LASER dec
Page 35: AGENDA - Questions … Please help

confidential - EUFANET

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