confidential - EUFANET
confidential - EUFANET
confidential - EUFANET
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BCB/Cu technology:<br />
Goal:<br />
Reach circuitry without degradation<br />
(BCB dielectric , Cu lines).<br />
Methodology:<br />
1. LASER cavity.<br />
2. Dry chemical (PLASMA) opening.<br />
Benefits:<br />
No degradation due acid use.<br />
LAT STM TOURS
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