10Gbps Optical Receiver and VCSEL Driver in 0.13um CMOS ...
10Gbps Optical Receiver and VCSEL Driver in 0.13um CMOS ...
10Gbps Optical Receiver and VCSEL Driver in 0.13um CMOS ...
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CHAPTER Ⅳ<br />
IC Fabrication <strong>and</strong> Experiment Results<br />
4.1 IC Fabrication<br />
10-Gb/s optical receiver <strong>and</strong> <strong>VCSEL</strong> driver were fabricated us<strong>in</strong>g<br />
a TSMC 0.13-μm mixed signal / RF process. This <strong>CMOS</strong> process has a<br />
silicide block, thick gate oxide (3.3V), deep N-well, thick top metal,<br />
<strong>and</strong> MiM capacitor options.<br />
Fig. 4.1 shows the microphotograph of fabricated optical receiver<br />
<strong>and</strong><br />
<strong>VCSEL</strong> driver. <strong>Optical</strong> receiver <strong>and</strong> <strong>VCSEL</strong> driver occupies the<br />
area of 1.8 x 1.35 mm 2 <strong>and</strong> 2.05 x 0.83 mm 2 , respectively.<br />
(a)<br />
38