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Electronics Spectra - SMS Lucknow

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<strong>SMS</strong> Institute of Technology, L ucknow<br />

MEMS<br />

INTRODUCTION<br />

A<br />

Micro-Electro-Mechanical System<br />

(MEMS) that contains both electrical<br />

and mechanical componen ts<br />

with its ranging size from nanometers<br />

to millimeters. MEMS is a device which<br />

is able to replace bulky networks, sensors,<br />

actuators on a common silicon<br />

substrate. These all are fabri cated<br />

using IC process sequences (e. g.<br />

CMOS, BICMOS process). This re -<br />

duces bulk, cost, weight and p ower<br />

consumption with increase in its performance,<br />

production volume.<br />

Furthermore, there are many applications<br />

to come including g enetic<br />

and disease testing, power dev ices,<br />

RF devices, weapon system and data<br />

storage. Micromirror- based switches<br />

have already proven their importance.<br />

MEMS promises to revolutionize almost<br />

all product category by fabricating together<br />

silicon-based microelectronics<br />

with micromachining technology, making<br />

possible the realization of complete<br />

system-on-chip.<br />

FABRICATION<br />

The fabrication technique used in<br />

MEMS consists of the conventio nal<br />

techniques developed for integrated<br />

circuit processing. The essential elements<br />

in conventional silicon processing<br />

are deposition, lithograph y, and<br />

etching.<br />

DEPOSITION<br />

The essential element in MEMS<br />

processing is the ability to deposit thin<br />

films of material. In this process, we<br />

assume that a thin layer to ha ve a<br />

thickness anywhere between a f ew<br />

nanometers to 100 micrometer. The<br />

thin film then can be etched with the<br />

help of developer. There may be various<br />

types of deposition used for this<br />

process which are as under:<br />

‣ Chemical vapour deposition<br />

‣ Epitaxy<br />

‣ Oxidation<br />

‣ Physical deposition:<br />

Sputtering<br />

Evaporation<br />

Spin-on method<br />

LITHOGRAPHY<br />

Lithography includes three<br />

sequential steps:<br />

‣ Application of photoresist, which<br />

is a photosensitive emulsion layer;<br />

‣ Optical exposure to print an i m-<br />

age of the mask onto the resist;<br />

‣ Immersion in an aqueous developer<br />

solution to dissolve the exposed<br />

resist and render visible the<br />

latent image.<br />

The pattern layout is generate d<br />

using a computer aided design and<br />

transferred into a layer a specialized<br />

mask-making facility, often by electron<br />

beam or laser beam. A complete<br />

microfabrication involves several lithographic<br />

operations with differ ent<br />

masks.<br />

ETCHING<br />

‣ Etch rate- The speed of the etching<br />

should be fast enough to be<br />

good for production but is als o<br />

controllable.<br />

‣ Uniformity- The etching is not location<br />

dependent.<br />

‣ Selectivity- Selection of developer<br />

through which etching is done is<br />

important.<br />

‣ Directionality- They can be isotropic<br />

, or anisotropic.<br />

Isotropic etchants etch unifor mly<br />

in all direction, resulting in rounded<br />

cross sectional.<br />

CATEGORIES OF MEMS<br />

There are several different c ategories<br />

of MEMS which are as under:<br />

Department of <strong>Electronics</strong> & Co mmunication<br />

Bulk micromachining<br />

Tejashwani Dubey<br />

EC - II year<br />

Bulk micromachining is a technique<br />

which builds mechanical elements by<br />

starting with a silicon wafer, and then<br />

etching away the unwanted parts and<br />

left with useful mechanical devices.<br />

Today almost all pressure sensors<br />

are built with bulk micromachining. Bulk<br />

micromachined pressure sensors offer<br />

several advantages over tradit ional<br />

pressure sensors. They cost less, are<br />

highly reliable, manufacturable, and<br />

there is very good repeatabili ty between<br />

devices. The small size and high<br />

reliability of micromachined pressure<br />

sensors make them ideal for a various<br />

of medical fields.<br />

Surface Micromachining<br />

In bulk micromachining, the de -<br />

vices are build by etching into a warfer,<br />

Surface micromachining builds devices<br />

from the wafer layer by layer. A Surface<br />

Micromachining is a repet itive<br />

33 <strong>Electronics</strong> <strong>Spectra</strong>, 2010

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