Pike Technologies Comprehensive Catalog of FTIR ... - Madatec

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MappIR and MAP300 – For Automated Analysis of Semiconductor Wafers PIKE Technologies MappIR Accessory PIKE Technologies MAP300 Accessory PIKE Technologies offers fully automated accessories for the analysis of semiconductor wafers. Our MappIR and MAP300 accessories provide for analysis of EPI, BPSG, Oxygen and Carbon in wafer sizes ranging from 2 to 12 inches (50 to 300 mm). The MappIR and MAP300 have been developed to provide the semiconductor industry with reasonably priced, automated tools for research and quality control of silicon wafers. The MappIR was developed for the analysis of 8 inch (200 mm) and smaller semiconductor wafers. The MAP300 is a larger version of this original design and it is capable of handling the newer 12 inch (300 mm) wafer formats. The operation, electronics and software are identical for both systems. The MappIR and MAP300 accessories mount in the sample compartment of the FTIR spectrometer. Semiconductor wafers are held in place by spring-loaded Delrin retaining clips and are never in contact with the metal base of the accessory. A standard size slot for a vacuum or mechanical wand is provided for ease of wafer handling. Individual wafers are rotated and/or translated by stepper motors in a sequence pre-programmed by the system operator. To minimize interferences of water vapor and carbon dioxide with infrared measurements, the optical path of the accessories are equipped with purging lines and can be purged with dry air or nitrogen. The accessories are controlled by AutoPRO software which provides a simple user interface for multiple point wafer analysis (mapping). Up to 320 points with 8 mm beam and 5 mm edge exclusion can be measured on a 12 inch wafer. The software provides ample flexibility in setting up various experiments. S PECIAL A PPLICATIONS F EATURES O F M APPIR AND MAP300 • Complete hardware and software package for automated, multi-position measurements and mapping of semiconductor wafers • 8 inch (200 mm) and 12 inch (300 mm) semiconductor wafer handling. Optional inserts for wafer sizes from 2 to 12 inches • EPI, BPSG, Oxygen and Carbon determination • Specular reflectance and transmission sampling – standard • Purgeable accessory for removal of atmospheric interferences The following are advantages of the AutoPRO package: • Graphical and intelligent user interface for setting-up mapping patterns • Selection of wafer size, IR beam diameter, and edge exclusion • Operator selectable or pre-defined multiple point maps • Polar and/or Cartesian coordinates options • Real-time display of the experiment status • Ability to save and recall various experimental patterns • Flexible, COM enabled interface Data collection and processing is provided by the spectrometer software. A number of FTIR manufacturers offer dedicated packages which fully integrate the accessory with the spectrometer. If such an option is not available, AutoPRO can be controlled by the spectrometer’s program via macros. AutoPRO is written in Visual BASIC and is Windows compliant and when run separately, it allows configuration, programming and control of the accessory. The automated wafer testing systems are compatible with most commercial FTIR spectrometers and software packages. 101
P IKE T ECHNOLOGIES WWW. PIKETECH. COM 608-274-2721 MappIR Automated Semiconductor Wafer Accessory P ART N UMBER 016-28XX D ESCRIPTION MappIR Automated Semiconductor Wafer Accessory for 8" Wafers Includes: Wafer mount, Motion Control Unit, AutoPRO software and mount for your FTIR Notes: Please insert FTIR XX code found on the fold-out on the last page of this catalog. Options for the MappIR Accessory P ART N UMBER D ESCRIPTION 073-3880 Additional 8" Wafer Mount 073-3800 Blank Wafer Support 073-3820 Insert to Support 2" Wafer 073-3830 Insert to Support 3" Wafer 073-3840 Insert to Support 4" Wafer 073-3850 Insert to Support 5" Wafer 073-3860 Insert to Support 6" Wafer 007-9000 Installation and Training Notes: For options not describe here, please contact PIKE Technologies. O RDERING I NFORMATION MAP300 Automated Semiconductor Wafer Accessory P ART N UMBER D ESCRIPTION 017-28XX MAP300 Automated Semiconductor Wafer Accessory for 12" Wafers Includes: Wafer mount, Motion Control Unit, AutoPRO software and mount for your FTIR. Notes: Please insert FTIR XX code found on the fold-out on the last page of this catalog. Options for the MAP300 Accessory P ART N UMBER D ESCRIPTION 017-3912 Additional 12" Wafer Mount 017-3980 Insert to Support 8" Wafer 017-3960 Insert to Support 6" Wafer 017-3950 Insert to Support 5" Wafer 017-3940 Insert to Support 4" Wafer 017-3930 Insert to Support 3" Wafer 017-3920 Insert to Support 2" Wafer 007-9000 Installation and Training Notes: For options not describe here, please contact PIKE Technologies. 102
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FTIR Instrument Code XX ABB Bomem F
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TABLE O F C ONTENTS Pages 1 - 6 Pag
Page 6 and 7:
Sampling Kits If you are not sure w
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Comprehensive Transmission Sampling
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Valu-Line - High Performance Set of
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Attenuated Total Reflectance Sampli
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Table 1: MIRacle Crystal Plate Spec
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MIRacle Base Optics (must select, i
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GladiATR Base Optics (must select,
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HATR Crystal Plate Choices PIKE Tec
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HATR and HATRPlus Pressure Clamp (m
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Optimized FTIR spectrum of polymer
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VeeMAX II with ATR - Variable Angle
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Classic VATR - Variable Angle ATR f
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Table 1 ATR Sampling ZnSe, Diamond
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Diffuse Reflectance Products Diffus
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DiffusIR - Research Grade Diffuse R
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UpIR - Upward Looking Diffuse Refle
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X, Y Autosampler - Transmission and
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Diffuse Reflectance - Theory and Ap
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Specular Reflectance Products Specu
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Changing the angle of incidence wit
Page 46 and 47:
80Spec - Grazing Angle Specular Ref
Page 48 and 49:
10Spec - Measures Sample Reflectanc
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Specular Reflectance - Theory and A
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Polarization Products Polarizers ma
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Infrared Polarizers - Theory and Ap
Page 56 and 57: Integrating Sphere Products Integra
Page 58 and 59: NIR IntegratIR - Integrating Sphere
Page 60 and 61: Integrating Spheres - Introduction
Page 62 and 63: Fiber Optic Sampling Products Fiber
Page 64 and 65: FlexIR - NIR Fiber Optic Accessory
Page 66 and 67: Microsampling Products Microsamplin
Page 68 and 69: Switching from transmission to refl
Page 70 and 71: Microsampling Tools - Compression C
Page 72 and 73: Beam Condensers - 4X and 6X Version
Page 74 and 75: Transmission Sampling Products Tran
Page 76 and 77: RotatIR - Automated Rotating Sample
Page 78 and 79: X, Y Autosampler - Transmission and
Page 80 and 81: Demountable Liquid Cells - For Vers
Page 82 and 83: Long-Path Quartz Liquid Cells - For
Page 84 and 85: Demountable Liquid Cell Windows (mu
Page 86 and 87: Bolt Press & Hydraulic Die - Low-Co
Page 88 and 89: PIKE CrushIR - Digital Hydraulic Pr
Page 90 and 91: Sample Preparation Accessories - Fo
Page 92 and 93: Disks, Windows and Powders - For Tr
Page 94 and 95: Disks, 41 mm Diameter 3 mm Thicknes
Page 96 and 97: Short Path Gas Cells - For Samples
Page 98 and 99: Long-Path Gas Cells - For Measureme
Page 100 and 101: Transmission Sampling Techniques -
Page 102 and 103: An alternate method for analysis of
Page 104 and 105: Special Applications Products PIKE
Page 108 and 109: TGA/FTIR Accessory - Identification
Page 110 and 111: Semiconductor Applications - FTIR S
Page 112 and 113: Other Useful Products for Spectrosc
Page 114 and 115: ATR spectra are somewhat different
Page 116 and 117: ATR Spectral Data Bases - Optimize
Page 118 and 119: Alphabetical Index A 10Spec, specul
Page 120 and 121: T Teflon gaskets, demountable cell
Page 122 and 123: 022-5340 HATR Liquid Jacketed Troug
Page 124 and 125: 160-1007 25 x 2 mm ZnSe (6 pack) 88
Page 126 and 127: 162-1130 Press-On Demountable Liqui
Page 128: We are PIKE Technologies, a small c
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Pike Technologies Comprehensive Catalog of FTIR ... - Madatec

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