Top-down and Bottom-up Approaches to Nanoscale Fabrication
Top-down and Bottom-up Approaches to Nanoscale Fabrication
Top-down and Bottom-up Approaches to Nanoscale Fabrication
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E-Beam Lithography<br />
•Smallest Feature Size of<br />
optical lithography is limited<br />
by wave length of light<br />
• Use a smaller wave length!<br />
• Use electrons!<br />
• Quantum Mechanics ⇒ all<br />
particles have a wave length<br />
• Higher energy ⇒ lower<br />
wave length<br />
Example<br />
19-040503TSCD
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