Top-down and Bottom-up Approaches to Nanoscale Fabrication
Top-down and Bottom-up Approaches to Nanoscale Fabrication
Top-down and Bottom-up Approaches to Nanoscale Fabrication
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Lithography, <strong>to</strong> date<br />
Miniaturized computing circuits require mass<br />
manufacturing of small features ⇒ push<br />
lithographic approach <strong>to</strong> new limits<br />
Some lithography approaches for manufacturing<br />
Optical lithography (including ultraviolet)<br />
X-Ray lithography<br />
Electron Beam lithography<br />
Ion Beam lithography<br />
“Dip-Pen” lithography<br />
…<br />
9-040503TSCD
Change language