Vacuum Valves

UHV All-Metal Right-Angle ValvesThe all-metal right-angle valves are of afully welded design. The valve diskmay be exchanged through the sideflange.Due to the selection of suitable materials,the valve stem need not be lubricatedafter every bake-out cycle.The drive spindle of the valves transfersthe motion via a pressure plateonto the sleeve-guided valve stemcarrying the screwed-on valve disk.The valve disk consists of a copperplate.Due to the specific properties ofcopper (ductility) this design offersgreat advantages over other materials:long service life and low closing forceswhen operating the valve.A very high leak tightness achieved,even with a low closing force.The compact design offers good operationalcharacteristics also in view oftemperature changes, offers a shortflow path and hence improved conductance.Advantages to the User- Leak rate at the valve seat below10 -11 mbar x l x s -1- Absolutely reliable sealing of valveseat- Simplest operation- No lubrication of the spindle isnecessary after bakeout- Large removable handwheel foreasy operationUHV All-Metal Right-Angle Valves, with Rotatable Flanges on Both SidesDimensional drawing for the UHV all-metalright-angle valveDimension TableDN A B C SW16 CF-R 88.0 38.0 15.5 8.040 CF-R 140 63 26 1763 CF-R 211.0 105.0 36.4 22.0Technical DataDNCFConnection flange rotatableDNService lifecyclesConductance formolecularflowl/ sPressure, absolutemin.mbarmax.barMounting orientationmmBake out temperaturewithout handwheel °CBake out temperaturewith handwheel °CMax. heating andcooling rate°C/minBellowsMaterialHousingValve diskValve disk sealWeightOrdering InformationMaterialMaterialMaterialkgUHV all-metal right-angle valves Part No.Spare valve disk, 2 pieces Part No.Spare hand wheel, plastic Part No.16 40 6316 CF-R 40 CF-R 63 CF-R1000 1000 10003 38 1001 x 10 -11 1 x 10 -11 1 x 10 -114 4 4any any any300 300 30080 80 804 4 2Stainless steel Stainless steel Stainless steel1.4541 1) 1.4541 1) 1.4541 1)Stainless steel Stainless steel Stainless steel1.4301 2) 1.4301 2) 1.4301 2)welded welded weldedCopper Copper CopperCopper Copper Copper0.4 2.0 5.0289 80 289 81 289 82215 410 – –215 412 215 442 –Oerlikon Leybold Vacuum Full Line Catalog1) = AISI Type 3162) = AISI Type 30443 C14