Vacuum Valves

UHV Gate Valves, ISO-F,Electropneumatically OperatedAdvantages to the UserPUR 1/8"3,5DN 63-16010DN 160VWU 1OSQTLNB DAJHO 1CM- Valve and pneumatic drive can bedegassed at temperatures up to250 °C and 200 °C respectively- Steel body (non-rusting)- Double-acting electropneumaticactuator (with position indicatorand pilot valve)KO 1Dimensional drawing for the UHV gate valvesISO-FDimension TableKLMNOO 1PQSTUU 1VWMGE x FConnection dimensions for ISO-F flanges(UHV gate valves)DN 63 ISO-F 100 ISO-F 160 ISO-F 250 ISO-Fmm 27 27 27 41mm 346 418 523 800mm 57 73 99 161mm 192 247 336 560mm 115 145 200 345mm 112 142 192 322mm 70 70 70 80mm 180 220 290 450mm 11 9 25 65mm 154 171 187 240mm 70 70 70 90mm 83 83 83 103mm 145 145 145 155mm 77 77 77 87- Bellows-sealed push gate feedthrough- Low play in the locked state andlow wear- Compact- Mechanically locked in the closedstateConnections for ISO-FDN 63 ISO-F 100 ISO-F 160 ISO-F 250 ISO-FAmm 70 70 70 100Bmm 130 165 225 350Cmm 110 145 200 310Dmm 70 100 150 261E x F4 x M8 8 x M8 8 x M10 12 x M10Gmm 13 13 13 15Hmm – 102 153 –Jmm – 3 5 –C14 58Oerlikon Leybold Vacuum Full Line Catalog