Vacuum Valves

Technical DataUHV Gate ValveDN 63 CF DN 100 CF DN 160 CF DN 200 CFTightnessBody mbar x l x s -1Valve seat mbar x l x s -1Pressure range, abs.High vacuum conductance l x s -1< 5 x 10 -10 < 5 x 10 -10 < 5 x 10 -10 < 5 x 10 -10< 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -91 x 10 -10 mbar 1 x 10 -10 mbar 1 x 10 -10 mbar 1 x 10 -10 mbarto 1.6 bar to 1.6 bar to 1.6 bar to 1.6 bar600 1700 6000 12000Differential pressure at the valve diskMax. differential pressureduring openingNumber of spindle turns for full travelService life until first maintenancebarmbarcycles≤ 1.6 in both ≤ 1.6 in both ≤ 1.6 in both ≤ 1.6 in bothdirections directions directions directions≤ 30 ≤ 30 ≤ 30 ≤ 3010 13 17 1750 000 50 000 50 000 50 000Degassing temperaturevalve open / closed °Cmanually operated °C250 / 200 250 / 200 250 / 200 250 / 200250 250 250 250Warming-up / cooling down speedInstallation orientationWeightMaterialBodyBellowsMechanismGaskets (head, disk)Ordering InformationUHV gate valve, manually operated°C x h -1kg80 80 80 80any any any any9 12 18 28AlSI 304 (1.4301) AlSI 304 (1.4301) AlSI 304 (1.4301) AlSI 304 (1.4301)AlSI 316 L (1.4435) AlSI 316 L (1.4435) AlSI 316 L (1.4435) AlSI 316 L (1.4435)AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301),AlSI 316 L (1.4404), AlSI 316 L (1.4404), AlSI 316 L (1.4404), AlSI 316 L (1.4404),AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310),AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034)Metal / Viton Metal / Viton Metal / Viton Metal / VitonUHV Gate ValveDN 63 CF DN 100 CF DN 160 CF DN 200 CFPart No. 286 85 Part No. 286 86 Part No. 286 87 Part No. 286 8816 set screwswith nuts and washers 1)Part No. 839 13 Part No. 839 13 2 x Part No. 839 13 2 x Part No. 839 131) For dimensions E x F see table “Connections for ISO-F”Oerlikon Leybold Vacuum Full Line Catalog57C14