Vacuum Valves

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HV Gate Valves, ISO-F,Electropneumatically OperatedAdvantages to the UserPKUW 1VOWTNQLPKU X V QTLO N- Cost-effective gate valve for industrialapplications with elastomersealedpush gate feedthrough- Aluminum body- Slim and light-weight- Low play in the locked state andlow wearDimensional drawing for the gate valves;DN 63 ISO-F and DN 100 ISO-FDimensional drawing for the gate valves;DN 160 ISO-F to DN 250 ISO-FDimension TableKLL 1NOPQTUVWXDN 63 ISO-F 100 ISO-F 160 ISO-F 200 ISO-F 250 ISO-Fmm 36 36 58 66 76mm 341.5 424.0 547.0 688.0 843.0mm 155.5 203.5 280.0 363.5 453.0mm 100 140 192 240 308mm 58 58 70 80 96mm 25 25 60 80 100mm 186.0 221.5 267.0 324.5 390.0mm 55 55 65 75 86mm 56.0 56.0 71.5 76.5 84.5mm 72 72 – – –mm 65.5 65.5 – – –mm 59 59 57 62 67B DAJHE x FO 1Connection dimensions for ISO-F flanges(HV Gate Valves)GCMConnections for ISO-FO 1 mm 131 166 237 290 352DN 63 ISO-F 100 ISO-F 160 ISO-F 200 ISO-F 250 ISO-FAmm 60 60 70 80 100Bmm 130 165 235 288 350Cmm 110 145 200 260 310Dmm 65 100 150 200 261E x F4 x M8 8 x M8 8 x M10 12 x M10 12 x M10Gmm 12 12 16 16 16Hmm 70 102 153 213 –Jmm 3 3 5 5 –Mmm 65.5 83.0 117.5 144.0 175.0C14 54Oerlikon Leybold Vacuum Full Line Catalog
Technical DataHV Gate ValveDN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-FTightnessBody mbar x l x s -1Valve seat mbar x l x s -1Pressure range, abs.High vacuum conductance l x s -1< 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9< 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -91 x 10 -7 mbar 1 x 10 -7 mbar 1 x 10 -7 mbar 1 x 10 -7 mbar 1 x 10 -7 mbarto 1.6 bar to 1.6 bar to 1.6 bar to 1.6 bar to 1.2 bar550 2000 6000 12000 22000Differential pressureat the valve disk, max.during opening, max.Compressed air, min. / max.Closing / opening timeService life until first maintenancembarmbarbarscycles≤ 1600 in both ≤ 1600 in both ≤ 1600 in both ≤ 1600 in both ≤ 1200 in bothdirections directions directions directions directions≤ 30 ≤ 30 ≤ 30 ≤ 30 ≤ 304 / 7 4 / 7 4 / 7 4 / 7 4 / 71.5 2.0 2.0 3.0 5.0200000 200000 100000 100000 100000Degassing temperaturevalve °Cpneumatic drive °Cposition indicator °Cpilot valve °C120 120 120 120 12080 80 80 80 8080 80 80 80 8050 50 50 50 50Switching capacityfor the position indicatorInstallation orientationWeightMaterialValve bodyValve diskMechanismGaskets (head, disk)Akg5 at 230 V AC; 5 at 230 V AC; 5 at 230 V AC; 5 at 230 V AC; 5 at 230 V AC;3 at 50 V DC 3 at 50 V DC 3 at 50 V DC 3 at 50 V DC 3 at 50 V DCany any any any any3.0 4.5 9.0 18.0 25.0AlMg4.5Mn AlMg4.5Mn G-AlSi7Mg G-AlSi7Mg G-AlSi7MgAlSI 304 (1.4301) AlSI 304 (1.4301) AlMgSi1, AlMgSi1, AlMgSi1,AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310),AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301),AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034)Viton Viton Viton Viton VitonOrdering InformationHV gate valve,electropneumatically operated024 V DC / 2.5 W024 V DC / 6 W230 V AC, 50 Hz / 7.1 WSet screwswith nuts and washers 1)(Package each containing)piecesHV Gate ValveDN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-FPart No. Part No.286 55 286 56 – – –Part No. Part No. Part No.– – 215 643 215 644 215 645Part No. Part No. Part No. Part No. Part No.286 45 286 46 215 653 215 654 215 655Part No. Part No. Part No. Part No. Part No.839 13 839 13 210 071 210 071 210 07116 16 12 12 121) For dimensions E x F see table “Connections for ISO-F”Oerlikon Leybold Vacuum Full Line Catalog55 C14
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Vacuum ValvesManually OperatedElect
Page 6 and 7: NotesC14 06Oerlikon Leybold Vacuum
Page 10 and 11: NotesC14 10Oerlikon Leybold Vacuum
Page 13 and 14: Straight-Through Valves, Bellows-Se
Page 15 and 16: Technical DataService lifeOrdering
Page 17 and 18: Technical DataService lifecyclesDN
Page 19 and 20: Technical Data DN 16 ISO-KF DN 25 I
Page 21 and 22: Right-Angle Valves, Bellows-Sealed,
Page 23 and 24: Technical Data DN 63 ISO-K DN 100 I
Page 25 and 26: Technical DataDN 250 ISO-KService l
Page 27 and 28: SECUVAC Vacuum Safety Valveshh 2bø
Page 29 and 30: Ordering InformationSECUVAC valve02
Page 31 and 32: Power Failure Venting Valves,Electr
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Page 37 and 38: Technical DataVacuum Lock / Sealing
Page 39 and 40: Right-Angle Valvefor Mobile Systems
Page 41 and 42: Solenoid Coils for DN 250 ISO-K35,5
Page 43 and 44: UHV All-Metal Right-Angle ValvesThe
Page 45 and 46: Gate Valves with ISO-KF/CF/ISO-F Fl
Page 47 and 48: Technical DataMiniature UHV Gate Va
Page 53: Technical DataHV Gate ValveDN 63 IS
Page 57 and 58: Technical DataUHV Gate ValveDN 63 C
Page 59 and 60: Technical DataTightnessBody mbar x
Page 61 and 62: Technical DataTightnessBody mbar x
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Vacuum Valves

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