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Vacuum Valves

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Technical DataMiniature UHV Gate ValveDN 40 ISO-KFDN 40 CFTightnessBody mbar x l x s -1Valve seat mbar x l x s -1Pressure range, abs.High vacuum conductance l x s -1< 5 x 10 -10 < 5 x 10 -10< 1 x 10 -9 < 1 x 10 -91 x 10 -10 mbar to 2 bar 1 x 10 -10 mbar to 2 bar160 220Differential pressureat the valve diskbar≤ 2 in both directions≤ 2 in both directionsMax. differential pressureduring openingService life until first maintenancembarcycles≤ 30 ≤ 3050 000 50 000Degassing temperaturevalve open / closed °Cmanually operated °C250 / 200 250 / 200250 250Installation orientationanyanyWeightMaterialValve bodyValve diskBellowsSeal (head, disk)Ordering Informationkg1.5 1.5AISI 304 (1.4301) AISI 304 (1.4301)AISI 304 (1.4301) AISI 304 (1.4301)AISI 316 L (1.4435) AISI 316 L (1.4435)Viton/VitonViton/VitonMiniature UHV Gate ValveDN 40 ISO-KFDN 40 CFMiniature gate valve, manually operated,handwheel6 set screwswith nuts and washers 1)Part No. 286 15 Part No. 286 84– Part No. 839 111) For dimensions E x F see table “Connections for CF”Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog49C14

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