Vacuum Valves

Technical DataTightnessBody mbar x l x s -1Valve seat mbar x l x s -1Pressure range, abs.High vacuum conductance l x s -1Differential pressure at the valve diskMax. differential pressureduring openingCompressed air, min. / max.Closing / opening timeOrdering InformationbarmbarbarCompressed air cylinder, volume m 3Service life until first maintenance cyclesDegassing temperaturevalve open / closed °Cpneumatic drive °Cposition indicator / pilot valve °CWarming-up / cooling down speed°C x h -1Pilot valvesupply voltage /power consumption- / WSwitching capacityfor the position indicatorat 80 °CInstallation orientationWeightMaterialBodyBellowsMechanismGaskets (head, disk)UHV gate valve,electropneumatically operated024 V DC / 6 W230 V AC, 50 Hz / 7.1 W16 set screwswith nuts and washers 1)sAkgUHV Gate ValveDN 63 CF DN 100 CF DN 160 CF DN 200 CF< 5 x 10 -10 < 5 x 10 -10 < 5 x 10 -10 < 5 x 10 -10< 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -9 < 1 x 10 -91 x 10 -10 mbar 1 x 10 -10 mbar 1 x 10 -10 mbar 1 x 10 -10 mbarto 1 bar to 1 bar to 1 bar to 1 bar600 1700 6000 120001 in both 1 in both 1 in both 1 in bothdirections directions directions directions30 30 30 304 / 7 4 / 7 4 / 7 5 / 71.0 1.2 1.5 4.00.08 0.11 0.14 0.3550 000 50 000 50 000 50 000250 / 200 250 / 200 250 / 200 250 / 200200 200 200 20080 / 50 80 / 50 80 / 50 80 / 5080 80 80 8024 V DC / 6 or 24 V DC / 6 or 24 V DC / 6 or 24 V DC / 6 or230 V AC, 230 V AC, 230 V AC, 230 V AC,50 Hz / 7.1 50 Hz / 7.1 50 Hz / 7.1 50 Hz / 7.15 at 250 V AC; 5 at 250 V AC; 5 at 250 V AC; 5 at 250 V AC;3 at 50 V DC 3 at 50 V DC 3 at 50 V DC 3 at 50 V DCany any any any9 12 18 28AlSI 304 (1.4301) AlSI 304 (1.4301) AlSI 304 (1.4301) AlSI 304 (1.4301)AlSI 316 L (1.4435) AlSI 316 L (1.4435) AlSI 316 L (1.4435) AlSI 316 L (1.4435)AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301), AlSI 304 (1.4301),AlSI 316 L (1.4404), AlSI 316 L (1.4404), AlSI 316 L (1.4404), AlSI 316 L (1.4404),AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310), AlSI 301 (1.4310),AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034) AlSI 420 (1.4034)Metal / Viton Metal / Viton Metal / Viton Metal / VitonUHV Gate ValveDN 63 CF DN 100 CF DN 160 CF DN 200 CFPart No. 286 89 Part No. 286 90 Part No. 286 91 Part No. 286 92Part No. 286 95 Part No. 286 96 Part No. 286 97 –Part No. 839 13 Part No. 839 13 2 x Part No. 839 13 2 x Part No. 839 131) For dimensions E x F see table “Connections for ISO-F”Oerlikon Leybold Vacuum Full Line Catalog61C14