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Vacuum Valves

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Miniature UHV Gate <strong>Valves</strong>, ISO-KF / CF,Electropneumatically OperatedAdvantages to the UserR 1/8"B DUKAB1I11968QDimensional drawing for the miniature UHV gate valves;electropneumatically operated, ISO-KF flangeHDimension TableABB 1CDE x FGHH 1H 2IKLNOO 1QTUVVO1DN 40 ISO-KF 40 CFmm 50 35mm 72 72mm 55 –mm – 58.7mm 40 40mm – 6 x M 6mm – 7mm 41.2 –mm – 48.3mm – 42mm 3 –mm 16 16mm 198 230mm 82 82mm 76 76mm 70 70mm 55 55mm 73 73mm 45 45mm – 32.5ONLKB DUACR 1/8"H 1H2G11968ExFVO 1Dimensional drawing for the miniature UHV gatevalves; electropneumatically operated, CF flangeONQL- Double-acting electropneumaticactuator (with position indicatorand pilot valve); bellows-sealedpush gate feedthrough- Valve technology with only onemoving part- Equipped with a mechanical positionindicator- Actuation free of particles andvibrations- Short closing time, very long servicelife- Compact, light-weight designC14 50Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog

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