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UHV All-Metal Variable Leak <strong>Valves</strong>ø46(1.81")32,5(1.28")DN 16 CF-R98,2 (3.87")M5DN 40 CF-F85,5 (3.37") 50 (2")Dimensional drawing for the all-metal variable leakvalvesTechnical DataUHV All-Metal Variable Leak <strong>Valves</strong>Connection flangesInputOutputDNDN16 CF-R40 CF-RGas flow, min. forPure gas mbar x l x s -1Air mbar x l x s -1Gas flowmax. mbar x l x s -1adjustable, max. mbar x l x s -1Tightness mbar x l x s -110 -1010 -96001001 x 10 -11Pressure absolutemin.max.mbarbar1 x 10 -1030Conductance for molecular flow l x s -1Operating temperature °CBakeout temperature °C0,7200350Valve seatValve plateHousingWeightMaterialMaterialMaterialkgCopper alloySapphireStainless steel1.4Ordering informationUHV All-Metal Variable Leak <strong>Valves</strong>UHV all-metal variable leak valveSpare valve plateSpare valve seatTool kit for valve seatPart No. 289 90Part No. 289 87Part No. 289 88Part No. 290 97C14 44Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog
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