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UHV Gate <strong>Valves</strong>, CFManually OperatedMechanical position indicatorPU10DN 160/200KU 1SOO 1Dimensional drawing for the UHV gate valvesDN 63 CF to DN 200 CFDimension TableKLMNOO 1PQSTUU 1VDN 63 CF 100 CF 160 CF 200 CFmm 27 27 27 35mm 408 462 552 660mm 57 73 99 125mm 192 247 336 430mm 115 145 200 250mm 112 142 192 240mm 70 70 70 80mm 180 220 290 350mm 11.0 9.0 25.0 38.5mm 184 184 184 200mm 70 70 70 90mm 83 83 83 103mm 77 77 77 94VTNMQLD BAE x FH 1H213Connection dimensions for CF flanges(UHV gate valves)Connections for CFH 2 mm 77.4 115.5 166.0 217.0DN 63 CF 100 CF 160 CF 200 CFA mm 70 70 70 80B 2 mm 113.5 151.6 202.4 253.2C mm 92.1 130.2 181.0 231.8D mm 70 100 150 200E x F 8 x M8 16 x M8 20 x M8 24 x M8H 1 mm 82.5 120.65 171.45 222.3CAdvantages to the User- Valve and wheel can be degassedat temperatures up to 250 °C- Steel body (non-rusting)- Bellows-sealed push gate feedthrough- Low play in the locked state andlow wear- Compact- Mechanically locked in the closedstate- Mechanical position indicatorC14 56Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog
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