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ProductsSmall <strong>Valves</strong> of the “micro” RangeOverview412 35 67 8 9Oerlikon Leybold <strong>Vacuum</strong> small valvesmicro are available with any of fourdrive systems, two types of body andthree adapters.Types of drive- Manual (1)- Pneumatic (2)- Electropneumatic (3)- Electromagnetic (4)Types of valve body- Right-angle valve (5)- Straight-through valve (6)as well as adapter- DN 10 ISO-KF flange (7)- 1/4" tube (8)- 6 mm tube (9)Hub 2ø3518Technical Informationmicro valves are supplied withoutadaptor.66,134,58M14x127,58M14x16,51618SW17ø30h1131DN 10 ISO-KF26 14,5SW 1714,5Tube ø1/4" x 0,7Tube ø6 x 0,5The adaptors must be ordered additionally.21Dimensional drawing for the micro MANConnection dimensions for small valves microOerlikon Leybold <strong>Vacuum</strong> Full Line Catalog07 C14
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