A New Scanning Method for Fast Atomic Force Microscopy - NT-MDT

This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication.13Figure 17. AFM images of NT-MDT TGQ1 grating scanned in open-loop using the CAV spiral for (a) - (c) f s = 5, 30, and 90 Hz. The number o f curvefor these AFM images was set to 512.Deflection (volt)Deflection (volt)0.80.60.40.250.85 50.9 50.95 51 51.05 51.1t (s)(b) w s = 1131.0 radians/s0.80.60.4(a) w s = 31.4 radians/s0.21.413 1.414 1.415 1.416 1.417 1.418 1.419t (s)Figure 16. Probe deflection signals showing the profile of the calibrationgrating for (a) ω s = 31.4 radians/s and (b) ω s = 754.0 radians/s.possible to achieve high-speed atomic force microscopy usingthe CAV spiral scanning, but other issues like the vibrationsin the AFM probe need to be considered and addressed. Theuse of CLV mode spiral scanning requires a high-bandwidthcontroller for accurate tracking of the input signals. Apartfrom the above mentioned artifacts formed at the center of theCLV spiral, the obtained AFM images have good qualities.We also demonstrated that the proposed method could workwell without using a feedback controller around the AFMscanner. The possibility of using spiral scanning in other SPMapplications such as STM should also be explored in the future.REFERENCES[1] G. Binnig, C. F. Quate, and C. Gerber, “Atomic force microscope,” Phys.Rev. Lett., vol. 56, no. 9, pp. 930–933, Mar. 1986.[2] E. Meyer, H. J. Hug, and R. Bennewitz, Scanning Probe Microscopy.Germany: Springer, 2004.[3] B. Bhushan, Springer Handbook of Nanotechnology. Springer, 2006.[4] S. O. R. Moheimani, “Invited review article: Accurate and fast nanopositioningwith piezoelectric tube scanners: Emerging trends and futurechallenges,” Rev. Sci. Instrum., vol. 79, no. 7, pp. 071 101(1–11), July2008.[5] Y. K. Yong, S. Aphale, and S. O. R. Moheimani, “Design, identification,and control of a flexure-based xy stage for fast nanoscale positioning,”Nanotechnology, IEEE Transactions on, vol. 8, no. 1, pp. 46 – 54, Jan.2009.[6] G. Schitter, K. Astrom, B. DeMartini, P. Thurner, K. Turner, andP. Hansma, “Design and modeling of a high-speed afm-scanner,” ControlSystems Technology, IEEE Transactions on, vol. 15, no. 5, pp. 906 – 915,Sept. 2007.[7] B. P. Lathi, Linear Systems and Signals, 2nd ed. Oxford UniversityPress, 2004.[8] D. Croft, G. Shed, and S. Devasia, “Creep, hysteresis, and vibrationcompensation for piezoactuators: Atomic force microscopy application,”J. Dyn. Sys., Meas., Control, vol. 123, no. 1, pp. 35 – 43, March 2001.[9] S. Devasia, E. Eleftheriou, and S. Moheimani, “A survey of controlissues in nanopositioning,” Control Systems Technology, IEEE Transactionson, vol. 15, no. 5, pp. 802 – 823, Sept. 2007.[10] N. Tamer and M. Dahleh, “Feedback control of piezoelectric tubescanners,” in Decision and Control, 1994., Proceedings of the 33rd IEEEConference on, vol. 2, Dec 1994, pp. 1826 – 1831 vol.2.[11] A. Daniele, S. Salapaka, M. Salapaka, and M. Dahleh, “Piezoelectricscanners for atomic force microscopes: Design of lateral sensors,identification and control,” in American Control Conference, 1999.Proceedings of the 1999, vol. 1, 1999, pp. 253 – 257 vol.1.[12] K. Leang and S. Devasia, “Feedback-linearized inverse feedforward forcreep, hysteresis, and vibration compensation in AFM piezoactuators,”Control Systems Technology, IEEE Transactions on, vol. 15, no. 5, pp.927 – 935, Sept. 2007.[13] S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, “Highbandwidth nano-positioner: A robust control approach,” Rev. Sci. Instrum.,vol. 73, no. 9, pp. 3232–3241, Sept. 2002.[14] G. Schitter and A. Stemmer, “Identification and open-loop trackingcontrol of a piezoelectric tube scanner for high-speed scanning-probe microscopy,”Control Systems Technology, IEEE Transactions on, vol. 12,no. 3, pp. 449 – 454, May 2004.[15] B. Bhikkaji, M. Ratnam, A. Fleming, and S. Moheimani, “Highperformancecontrol of piezoelectric tube scanners,” Control SystemsTechnology, IEEE Transactions on, vol. 15, no. 5, pp. 853 – 866, Sept.2007.[16] W. Zhang, L. Miao, Y. Zheng, Z. Dong, and N. Xi, “Feedback controlimplementation for AFM contact-mode scanner,” in Nano/MicroEngineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEEInternational Conference on, Jan. 2008, pp. 617–621.[17] C. Lee and S. M. Salapaka, “Robust broadband nanopositioning: Fundamentaltrade-offs, analysis, and design in a two-degree-of-freedomcontrol framework,” Nanotechnology, vol. 20, no. 3, p. 035501 (16pp),2009.[18] A. N. Labinsky, G. A. J. Reynolds, and J. Halliday, “A disk recordingsystem and a method of controlling the rotation of a turn table in sucha disk recording system,” WO, vol. 93/13524, July 2001.[19] A. D. L. Humphris, J. K. Hobbs, and M. J. Miles, “Ultrahigh-speedscanning near-field optical microscopy capable of over 100 frames persecond,” Applied Physics Letters, vol. 83, no. 1, pp. 6 – 8, 2003.[20] G. Schitter and M. J. Rost, “Scanning probe microscopy at video-rate,”Materials Today, vol. 11, no. Supplement 1, pp. 40 – 48, 2008.Copyright (c) 2009 IEEE. Personal use is permitted. For any other purposes, Permission must be obtained from the IEEE by emailing pubs-permissions@ieee.org.Authorized licensed use limited to: University of Newcastle. Downloaded on November 26, 2009 at 00:02 from IEEE Xplore. Restrictions apply.