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NUCLEATION AND GROWTH OF Cu THIN FILMS ON SILICON ...

NUCLEATION AND GROWTH OF Cu THIN FILMS ON SILICON ...

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76 Noriah Bidin And Siti Noraiza Abd. RazakReferences1. K. Ma, J.Y. Feng, J. Cryst. Growth 270 (2004), 15-20.2. M.D. Thouless, Thin Solid Films 181 (1989), 397-406.3. D.K. Sarkar, S. Bera, S.V. Narasimhan, S. Chowdhury, A. Gupta, K.G.M. Nair, Solid StateCommun. 107 (1998), 413-416.4. M.Yu, J. Zhang , D. Li, Q. Meng , W. Li, Surface & Coatings Technology 201 (2006), 1243-12495. S.M. Lee, V. Zubkov, Z. <strong>Cu</strong>i, M. Shek, L.Q. Xia and H.M. Saad, Paten, US 7718548 B2, May18, 2010.6. J. Ye, Q. Chen, Y. Xiong, Y. Chai, and P. Chen. Phys. Stat. Sol. (a) 205 (2008), 1580-1584.7. F. Loffler, Surf. Coat. Technol. 132 (2000) 222-227.8. Y. Funada, K. Awazu, H. Yasui, T. Sugita, Surf. Coat. Technol. 128-129 (2000), 308-312.9. A. Gat, L.Gerzberg, J.F. Gibbons, T.J. Magee, J.Peng and J.D. Hong, Appl. Phys. Lett. 33(1978), 775-778.10. T. Serikawa, S. Shirai, A. Okamoto and S. Suyama, IEEE Trans. Electron Devices 36 (1989),1929-1933.11. T. Sameshima, S. Usui and M.Sekiya, IEEE Electron Device Lett. 7 (1986), 276-278.12. T. Sameshima, M.Hara and S. Usui, Jpn. J. Appl. Phys. 28 (1989), 1789-1793.13. R.Z. Bachrach, K. Winer, J.b. Boyce, S.E Ready, R.I. Johanson and G.B. Anderson, J. Electron.Mater. 19(1990), 241-248.14. S.N Razak, N. Bidin, Proc 2010 International Conference on Enabling Science andNanotechnology, EsciNano 2010. (Scopus).15. R. Carluccio, S. Cina, G. Fortunato, S. Friligkos, and J. Stoemenos, Thin Solid Films 296(1997), 57-60.16. M. Matsumura and C. H. Oh. Thin Solid Films 337 (1999), 123-128.17. I. A. Palani, N. J. Vasa, and M. Singaperumal, Materials Science In Semiconductor Processing11 (2008), 107-116.18. H. Watanabe, H.Miki, S. Sugai, K.Kawasaki, and T. Kioka. Jpn. J. Appl. Phys. 33 (1994),4491-4498.19. K. Brendel, N. H. Nickel, P. Lengsfeld, A. Schöpke, I. Sieber, M. Nerding, H. P. Strunk andW. Fuhs, Thin Solid Films, 427 (2003), 86-90.20. L. Mariucci, A. Pecora, G. Fortunato, C. Spinella and C. Bongiorno, Thin Solid Films 427(2003), 91-95.21. N. Bidin and S.N.Razak, Proc. Saudi Int. Electronic, Communication and Photonic Conference(SIECPC-2011), Riyadh Saudi Arabia, 24-26 April, 201122. J. Armengol, F. Vega, N. Chaoui, J. Solis, C. N. Afonso, J. Applied Physics , 93 (2003),1505-1510.23. X. Zhang and A. Atrens, Materials Science and Engineering: A, 159 (1992), 243-251.

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