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DRAFT 7/12/05 - MHz Electronics, Inc

DRAFT 7/12/05 - MHz Electronics, Inc

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SH-110 Dry Scroll Vacuum Pumpzo<strong>DRAFT</strong> 7/<strong>12</strong>/<strong>05</strong><strong>12</strong>0.00Figure 1Interface Drawing with DimensionsSH 110 PUMPING SPEED - AIRTEST PERFORMED IAW ISO 1607-1:1993(E)110.00100.0090.00Pumpig speed - l/min80.0070.0060.0<strong>05</strong>0.0040.0030.0020.0010.000.001.E-02 1.E-01 1.E+00 1.E+01 1.E+02 1.E+03Presure - Torr50Hz, 115VAC60Hz, 115VACFigure 2Pumping Speed Curves16

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