Kinetic and Strain-Induced Self-Organization of SiGe ...

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Preface Eidesstattliche Erklärung Ich erkläre an Eides statt, dass ich die vorliegende Doktorarbeit selbstständig und ohne fremde Hilfe verfasst, <strong>and</strong>ere als die angegebenen Quellen und Hilfsmittel nicht benutzt bzw. die wörtlich oder sinngemäß entnommenen Stellen als solche kenntlich gemacht habe. i Herbert Lichtenberger
Page 1: J O H A N N E S K E P L E R U N I V
Page 5 and 6: PREFACE iii Abstract A kinetic grow
Page 7 and 8: Contents Preface i Eidesstattliche
Page 9 and 10: CONTENTS vii 5 Self-Organized Growt
Page 11: Part I Basics 1
Page 14 and 15: 4 CHAPTER 1. SILICON-GERMANIUM MATE
Page 20 and 21: 10 CHAPTER 1. SILICON-GERMANIUM MAT
Page 26 and 27: 16 CHAPTER 2. MOLECULAR BEAM EPITAX
Page 40 and 41: 30 CHAPTER 3. METHODS OF INVESTIGAT
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Chapter 4 Self-Organized Growth - S
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4.1. INTRODUCTION TO STEP-BUNCHING
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4.1. INTRODUCTION TO STEP-BUNCHING
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4.2. OPTIMIZATION OF STEP-BUNCHING
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Chapter 5 Self-Organized Growth 2 -
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5.2. KINETIC STEP-BUNCHING AND STRA
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5.3. ORDERING AND SIZE OF SIGE-ISLA
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5.4. CLOSER LOOK ON SURFACE ENERGY
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Chapter 6 p-Modulation Doping and M
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6.1. INTRODUCTION TO P-MODULATION D
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6.1. INTRODUCTION TO P-MODULATION D
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6.2. EXPERIMENTAL ASPECTS AND MOBIL
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6.3. OUTLOOK AND PERSPECTIVES 111 l
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Part III Additional Work 113
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116 CHAPTER 7. TRANSIENT-ENHANCED S
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126 CHAPTER 8. GERMANIUM SOURCE REC
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134 APPENDIX A. CALIBRATION AND CHA
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146 APPENDIX B. GENERAL PHYSICAL DA
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148 BIBLIOGRAPHY [17] R. M. Tromp a
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150 BIBLIOGRAPHY [65] J. A. Venable
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152 BIBLIOGRAPHY [109] M. Mühlberg
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154 BIBLIOGRAPHY [153] M. Kästner
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156 BIBLIOGRAPHY [196] M. Myronov,
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158 BIBLIOGRAPHY [237] H. Watanabe,
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160 POSTFACE List of Publications
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162 POSTFACE Acknowledgements I wou
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Kinetic and Strain-Induced Self-Organization of SiGe ...

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