Kinetic and Strain-Induced Self-Organization of SiGe ...

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34 CHAPTER 3. METHODS OF INVESTIGATION Figure 3.2: Schematic view of hardware components and signal pathways in noncontact (NC) AFM-mode [81]. � Source: AFM schematic-principle.jpg resolution is usually limited to the step size according to the number of image data points (e.g. 512 × 512) [82]. [74] 3.3.3 Imaging Artifacts Atomic force microscope images are among the easiest-to-interpret of all images generated by any microscopy technique. With these 3-dimensional AFM images it is easy to determine whether a feature is protruding from the surface or recessed into it [74]. Tip Convolution In scanning probe microscopy most imaging artifacts arise from the tip imaging, i.e. the imaging of the convolution of the sample surface and the tip. As the tips are not ideal, in case of features that are sharper than the tip, the image is dominated by the shape of the tip, rather than by the true edge profile of the structure. In Fig. 3.3 the origin of tip convolution is demonstrated. Many samples have features with steep sides and therefore tip imaging is a common occurrence in images. As a consequence, sidewall angles should be measured routinely in order to check, whether the imaged slope is limited to the shape of the
3.3. ATOMIC FORCE MICROSCOPY (AFM) 35 Figure 3.3: a) Path of the AFM-tip proving the topography and (b) the effect of tip convolution on the resulting image. � Source: AFM tip-path.jpg tip, or really represents the topography of the sample. At least the height of features can be measured and reproduced accurately as long as features are separated wide enough so that the tip touches the bottom between these features. The lateral dimensions of the imaged features provide just a maximum value, i.e. if one measures a protruding tip-imaged feature giving a width of 250 ˚A, it is clear that the feature is at most 250 ˚A wide. Feedback Artifacts SPM images are also affected by feedback artifacts, if the feedback loop is not optimized. In the case of high feedback gains the system may oscillate, generating high frequency periodic noise in the image, either throughout the image or just localized to structures with steep slopes. For feedback gains that are too low, the tip cannot track the surface well and the images loose detail and appear smooth. Another effect in the low gain case that is less obvious is ”ghosting”. On sharp slopes, an overshoot can occur in the image as the tip scans up the slope, and an undershoot can occur as the tip scans down the slope. This artifact can usually be seen on steep features, imaged as bright ridges on the uphill side and/or dark shadows on the downhill side of the structure. Image Processing Capabilities Commercial SPMs are usually equipped with sophisticated image-processing software, pro- viding curvature enhancement algorithms, filters for environmental noise, or giving the op- portunity for retouching areas of bad data, etc.
Page 1: J O H A N N E S K E P L E R U N I V
Page 4 and 5: ii PREFACE Kurzfassung Eine kinetis
Page 6 and 7: iv PREFACE
Page 8 and 9: vi CONTENTS 2.1.3 Growth-Modes . .
Page 10 and 11: viii CONTENTS B General Physical Da
Page 13 and 14: Chapter 1 Silicon-Germanium Materia
Page 15 and 16: 1.1. STRUCTURAL PROPERTIES 5 Figure
Page 17 and 18: 1.2. VICINAL SI(001) 7 Vicinal subs
Page 19 and 20: 1.3. ELECTRONIC PROPERTIES 9 Monoat
Page 21 and 22: 1.3. ELECTRONIC PROPERTIES 11 Silic
Page 23 and 24: 1.4. SILICON GERMANIUM ALLOYS (SI1
Page 25 and 26: Chapter 2 Molecular Beam Epitaxy (M
Page 27 and 28: 2.1. MBE-GROWTH 17 hit the substrat
Page 29 and 30: 2.1. MBE-GROWTH 19 Figure 2.3: The
Page 31 and 32: 2.2. CLEANING PROCEDURE 21 rameter
Page 33 and 34: 2.2. CLEANING PROCEDURE 23 H2SO4 :
Page 35 and 36: 2.3. MBE-SYSTEM 25 Figure 2.7: All-
Page 37 and 38: 2.3. MBE-SYSTEM 27 Figure 2.9: Sche
Page 39 and 40: Chapter 3 Methods of Investigation
Page 41 and 42: 3.2. SCANNING ELECTRON MICROSCOPY (
Page 43: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 47 and 48: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 49 and 50: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 51: Part II Main Research 41
Page 54 and 55: 44 CHAPTER 4. SELF-ORGANIZED GROWTH
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84 CHAPTER 5. SELF-ORGANIZED GROWTH
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86 CHAPTER 6. P-MODULATION DOPING A
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100 CHAPTER 6. P-MODULATION DOPING
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Chapter 7 Transient-Enhanced Si Dif
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7.3. EXPERIMENTAL RESULTS 117 > 100
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7.3. EXPERIMENTAL RESULTS 119 Figur
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7.4. DETAILED CHARACTERIZATION AND
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7.4. DETAILED CHARACTERIZATION AND
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Chapter 8 Germanium Source Reconstr
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Figure 8.2: Elevated front-view of
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water lines. Figure 8.4: Photograph
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Figure 8.7: Part 2 of final constru
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Appendix A Calibration and Characte
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A.1. CALIBRATIONS 135 Figure A.1: X
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A.1. CALIBRATIONS 137 Figure A.3: N
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A.2. PHOTOLUMINESCENCE 139 Sample 1
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A.2. PHOTOLUMINESCENCE 141 Figure A
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A.2. PHOTOLUMINESCENCE 143 Figure A
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Appendix B General Physical Data B.
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Bibliography [1] Herbert Lichtenber
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BIBLIOGRAPHY 149 [42] M. B. Prince,
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BIBLIOGRAPHY 151 [85] J. Zhu, K. Br
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BIBLIOGRAPHY 153 [130] C. S. Peng,
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BIBLIOGRAPHY 155 [174] G. Medeiros-
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BIBLIOGRAPHY 157 [214] G. Bastard,
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Postface Curriculum Vitae ⋄ ∗ 1
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POSTFACE 161 � D. Gruber, D. Pach
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POSTFACE 163 Abbreviations AFM Atom
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