Kinetic and Strain-Induced Self-Organization of SiGe ...

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vi CONTENTS 2.1.3 Growth-Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.1.4 Heteroepitaxy versus Homoepitaxy . . . . . . . . . . . . . . . . . . . 20 2.1.5 Relevant Temperatures in MBE . . . . . . . . . . . . . . . . . . . . . 21 2.2 Cleaning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 2.2.1 Pre-Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 2.2.2 RCA-Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 2.2.3 HF-Dip . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 2.2.4 Oxide-Desorption . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 2.3 MBE-System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 2.3.1 Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 2.3.2 Evaporation and Rate Measurement . . . . . . . . . . . . . . . . . . . 26 2.3.3 Heating and Temperature Measurement . . . . . . . . . . . . . . . . . 26 2.3.4 Controlling and Monitoring . . . . . . . . . . . . . . . . . . . . . . . . 27 3 Methods of Investigation 29 3.1 Transmission Electron Microscopy (TEM) . . . . . . . . . . . . . . . . . . . . 30 3.2 Scanning Electron Microscopy (SEM) . . . . . . . . . . . . . . . . . . . . . . 31 3.3 Atomic Force Microscopy (AFM) . . . . . . . . . . . . . . . . . . . . . . . . 31 3.3.1 Scanning Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 3.3.2 AFM-Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 3.3.3 Imaging Artifacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 3.3.4 Data Types and Data Representation . . . . . . . . . . . . . . . . . . 36 II Main Research 41 4 Self-Organized Growth – Step-Bunching 43 4.1 Introduction to Step-Bunching . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.1.1 Dependence on Temperature, Rate, Thickness, Ge-content and Miscut 45 4.1.2 Kinetic vs. Strain-Induced Step-Bunching . . . . . . . . . . . . . . . . 47 4.2 Optimization of Step-Bunching for Ripple-Patterns . . . . . . . . . . . . . . . 48
CONTENTS vii 5 Self-Organized Growth 2 – Kinetics and Strain 55 5.1 Introduction to State-of-the-Art Ge-Dots . . . . . . . . . . . . . . . . . . . . . 55 5.2 Kinetic Step-Bunching and Strain-Driven Island Growth . . . . . . . . . . . . 57 5.2.1 Influence of Ripple-Template Annealing . . . . . . . . . . . . . . . . . 57 5.2.2 SiGe-Overgrowth of Step-Bunching Template – Strain-Effects . . . . . 57 5.3 Ordering and Size of SiGe-Islands . . . . . . . . . . . . . . . . . . . . . . . . . 65 5.4 Closer Look on Surface Energy Effects – Facetting . . . . . . . . . . . . . . . 70 5.4.1 Surface Energy Minimization via Excessive Facetting . . . . . . . . . . 77 5.4.2 Step-Bunching Templates for p-Modulation Doped SiGe-Structures . . 83 6 p-Modulation Doping and Mobility Analysis 85 6.1 Introduction to p-Modulation Doping . . . . . . . . . . . . . . . . . . . . . . 86 6.2 Experimental Aspects and Mobility Analysis . . . . . . . . . . . . . . . . . . 90 6.2.1 Processing of Hall-Bars . . . . . . . . . . . . . . . . . . . . . . . . . . 91 6.2.2 Cryo-Measurements and Data Evaluation . . . . . . . . . . . . . . . . 93 6.2.3 Data Interpretation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101 6.3 Outlook and Perspectives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110 III Additional Work 113 7 Transient-Enhanced Si Diffusion 115 7.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116 7.2 Template Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116 7.3 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117 7.4 Detailed Characterization and Discussion . . . . . . . . . . . . . . . . . . . . 121 8 Germanium Source Reconstruction 125 A Calibration and Characterization of Sources 133 A.1 Calibrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133 A.2 Photoluminescence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Page 1: J O H A N N E S K E P L E R U N I V
Page 4 and 5: ii PREFACE Kurzfassung Eine kinetis
Page 6 and 7: iv PREFACE
Page 10 and 11: viii CONTENTS B General Physical Da
Page 13 and 14: Chapter 1 Silicon-Germanium Materia
Page 15 and 16: 1.1. STRUCTURAL PROPERTIES 5 Figure
Page 17 and 18: 1.2. VICINAL SI(001) 7 Vicinal subs
Page 19 and 20: 1.3. ELECTRONIC PROPERTIES 9 Monoat
Page 21 and 22: 1.3. ELECTRONIC PROPERTIES 11 Silic
Page 23 and 24: 1.4. SILICON GERMANIUM ALLOYS (SI1
Page 25 and 26: Chapter 2 Molecular Beam Epitaxy (M
Page 27 and 28: 2.1. MBE-GROWTH 17 hit the substrat
Page 29 and 30: 2.1. MBE-GROWTH 19 Figure 2.3: The
Page 31 and 32: 2.2. CLEANING PROCEDURE 21 rameter
Page 33 and 34: 2.2. CLEANING PROCEDURE 23 H2SO4 :
Page 35 and 36: 2.3. MBE-SYSTEM 25 Figure 2.7: All-
Page 37 and 38: 2.3. MBE-SYSTEM 27 Figure 2.9: Sche
Page 39 and 40: Chapter 3 Methods of Investigation
Page 41 and 42: 3.2. SCANNING ELECTRON MICROSCOPY (
Page 43 and 44: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 51: Part II Main Research 41
Page 54 and 55: 44 CHAPTER 4. SELF-ORGANIZED GROWTH
Page 56 and 57: 46 CHAPTER 4. SELF-ORGANIZED GROWTH
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48 CHAPTER 4. SELF-ORGANIZED GROWTH
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86 CHAPTER 6. P-MODULATION DOPING A
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100 CHAPTER 6. P-MODULATION DOPING
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Chapter 7 Transient-Enhanced Si Dif
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7.3. EXPERIMENTAL RESULTS 117 > 100
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7.3. EXPERIMENTAL RESULTS 119 Figur
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7.4. DETAILED CHARACTERIZATION AND
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7.4. DETAILED CHARACTERIZATION AND
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Chapter 8 Germanium Source Reconstr
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Figure 8.2: Elevated front-view of
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water lines. Figure 8.4: Photograph
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Figure 8.7: Part 2 of final constru
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Appendix A Calibration and Characte
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A.1. CALIBRATIONS 135 Figure A.1: X
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A.1. CALIBRATIONS 137 Figure A.3: N
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A.2. PHOTOLUMINESCENCE 139 Sample 1
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A.2. PHOTOLUMINESCENCE 141 Figure A
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A.2. PHOTOLUMINESCENCE 143 Figure A
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Appendix B General Physical Data B.
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Bibliography [1] Herbert Lichtenber
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BIBLIOGRAPHY 149 [42] M. B. Prince,
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BIBLIOGRAPHY 151 [85] J. Zhu, K. Br
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BIBLIOGRAPHY 153 [130] C. S. Peng,
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BIBLIOGRAPHY 155 [174] G. Medeiros-
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BIBLIOGRAPHY 157 [214] G. Bastard,
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Postface Curriculum Vitae ⋄ ∗ 1
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POSTFACE 161 � D. Gruber, D. Pach
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POSTFACE 163 Abbreviations AFM Atom
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