Kinetic and Strain-Induced Self-Organization of SiGe ...

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40 CHAPTER 3. METHODS OF INVESTIGATION
Part II Main Research 41
Page 1: J O H A N N E S K E P L E R U N I V
Page 4 and 5: ii PREFACE Kurzfassung Eine kinetis
Page 6 and 7: iv PREFACE
Page 8 and 9: vi CONTENTS 2.1.3 Growth-Modes . .
Page 10 and 11: viii CONTENTS B General Physical Da
Page 13 and 14: Chapter 1 Silicon-Germanium Materia
Page 15 and 16: 1.1. STRUCTURAL PROPERTIES 5 Figure
Page 17 and 18: 1.2. VICINAL SI(001) 7 Vicinal subs
Page 19 and 20: 1.3. ELECTRONIC PROPERTIES 9 Monoat
Page 21 and 22: 1.3. ELECTRONIC PROPERTIES 11 Silic
Page 23 and 24: 1.4. SILICON GERMANIUM ALLOYS (SI1
Page 25 and 26: Chapter 2 Molecular Beam Epitaxy (M
Page 27 and 28: 2.1. MBE-GROWTH 17 hit the substrat
Page 29 and 30: 2.1. MBE-GROWTH 19 Figure 2.3: The
Page 31 and 32: 2.2. CLEANING PROCEDURE 21 rameter
Page 33 and 34: 2.2. CLEANING PROCEDURE 23 H2SO4 :
Page 35 and 36: 2.3. MBE-SYSTEM 25 Figure 2.7: All-
Page 37 and 38: 2.3. MBE-SYSTEM 27 Figure 2.9: Sche
Page 39 and 40: Chapter 3 Methods of Investigation
Page 41 and 42: 3.2. SCANNING ELECTRON MICROSCOPY (
Page 43 and 44: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 49: 3.3. ATOMIC FORCE MICROSCOPY (AFM)
Page 54 and 55: 44 CHAPTER 4. SELF-ORGANIZED GROWTH
Page 96 and 97: 86 CHAPTER 6. P-MODULATION DOPING A
Page 98 and 99: 88 CHAPTER 6. P-MODULATION DOPING A
Page 100 and 101:
90 CHAPTER 6. P-MODULATION DOPING A
Page 102 and 103:
Page 104 and 105:
Page 106 and 107:
Page 108 and 109:
Page 110 and 111:
100 CHAPTER 6. P-MODULATION DOPING
Page 112 and 113:
Page 114 and 115:
Page 116 and 117:
Page 118 and 119:
Page 120 and 121:
Page 122 and 123:
Page 125 and 126:
Chapter 7 Transient-Enhanced Si Dif
Page 127 and 128:
7.3. EXPERIMENTAL RESULTS 117 > 100
Page 129 and 130:
7.3. EXPERIMENTAL RESULTS 119 Figur
Page 131 and 132:
7.4. DETAILED CHARACTERIZATION AND
Page 133 and 134:
7.4. DETAILED CHARACTERIZATION AND
Page 135 and 136:
Chapter 8 Germanium Source Reconstr
Page 137 and 138:
Figure 8.2: Elevated front-view of
Page 139 and 140:
water lines. Figure 8.4: Photograph
Page 141 and 142:
Figure 8.7: Part 2 of final constru
Page 143 and 144:
Appendix A Calibration and Characte
Page 145 and 146:
A.1. CALIBRATIONS 135 Figure A.1: X
Page 147 and 148:
A.1. CALIBRATIONS 137 Figure A.3: N
Page 149 and 150:
A.2. PHOTOLUMINESCENCE 139 Sample 1
Page 151 and 152:
A.2. PHOTOLUMINESCENCE 141 Figure A
Page 153 and 154:
A.2. PHOTOLUMINESCENCE 143 Figure A
Page 155 and 156:
Appendix B General Physical Data B.
Page 157 and 158:
Bibliography [1] Herbert Lichtenber
Page 159 and 160:
BIBLIOGRAPHY 149 [42] M. B. Prince,
Page 161 and 162:
BIBLIOGRAPHY 151 [85] J. Zhu, K. Br
Page 163 and 164:
BIBLIOGRAPHY 153 [130] C. S. Peng,
Page 165 and 166:
BIBLIOGRAPHY 155 [174] G. Medeiros-
Page 167 and 168:
BIBLIOGRAPHY 157 [214] G. Bastard,
Page 169 and 170:
Postface Curriculum Vitae ⋄ ∗ 1
Page 171 and 172:
POSTFACE 161 � D. Gruber, D. Pach
Page 173:
POSTFACE 163 Abbreviations AFM Atom
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Kinetic and Strain-Induced Self-Organization of SiGe ...

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