SIM0216

More documents

Recommendations

Info

ELECTRON MICROSCOPY Fig. 3: (A) SEM image of multiple graphene flakes, noticeable by the darker color for multilayers. (B) Raman spectrum measured on the position indicated in A, of a representative location on the graphene flake, the D, G, and 2D bands are indicated. (C, D, E) integrated Raman intensity of the D, G, and 2D graphene bands. Chemical Specificity with Electron Microscopy Integrated Raman and electron microscopy enables the correlative analysis of samples with both chemical specific Raman- and nanometer resolution electron microscopy. Applications demonstrating correlative chemical specificity and high resolution are performed on multiple samples. First a sample containing multiple different crystals is analyzed, showing spectral Raman analysis correlated to particle morphologies observed with SEM. Second a sample of graphene flakes, fabricated through chemical deposition, is investigated for potential contaminations and spectral intensity analysis of the D, G, and 2D Raman bands. Correlative chemical and high resolution microscopic analysis is demonstrated in figure 2, where crystal sub-micron morphological and chemical specific analysis is demonstrated. The samples contain many different structures two calcium carbonate polymorphisms, calcite and vaterite and calcium sulfate crystals, further the photosynthetic bacteria M. aeruginosa is analyzed. Figure 2A, and B shows the correlative SEM and Raman cluster image from the observed region of interest. Specific structures in the analyzed region are indicated in 2C, and the corresponding spectra are presented in figure 2D, E, and F. Calcium sulfate crystals are identified by their 1006 cm -1 Raman band, and a needle like shape is observed in the SEM analysis, the polymorphisms calcite and Fig. 4: (A) SEM image of FIB patterned silicon. (B) 1 st order silicon Raman band analysis. (C, D, E) Intensity, spectral width, and peak position of the 1 st order silicon band over the FIB patterned region. (F) Raman band of amorphous silicon, indicated on the 450 cm -1 region. (G) Intensity map of amorphous silicon [3]. vaterite are identified by the Raman band positions at 1086 cm -1 and 1088 cm -1 respectively. Correlative Raman Electron Microscopy of Graphene Correlative Raman micro-spectroscopy with electron microscopy is performed on a sample containing graphene flakes (fig. 3). The sample is fabricated with a chemical vapor deposition method on a nickel substrate. The process fabricates singleand multi-layer graphene, with multi-layers visible as darker areas in SEM analysis. The graphene structure quality on nickel is investigated with Raman microspectroscopy. The known Raman bands for graphene the 2D, G and D bands are visible in the spectra. The graphene D band is often an indication of disorder in the graphene structure. Performing a Raman microscopic image reveals an overall high quality sample, low D-band intensity, specific the locations with high D-band intensity can potentially be further investigated at higher resolution using correlative electron microscopy. Further the Raman intensity maps of the G- and 2D- band are provided in figure 3D and E, showing increased Raman activity for multi-layer graphene on nickel. The use of Raman spectroscopy for detection of single or multiple layers of graphene and analysis of the thickness uniformity More information: http://bit.ly/IM-Raman More information on Focused Ion Beam: http://bit.ly/IM-FIB [1] All references: http://bit.ly/IM-Timmermans 36 • G.I.T. Imaging & Microscopy 2/2016
ELECTRON MICROSCOPY and spatial distribution of the flakes is demonstrated, additional correlative SEM enables the high resolution analysis of interesting sample features or potential defects. Furthermore electron microscopy enables the fast localization of regions of interest (ROI) for chemical specific Raman analysis. Further applications, for example, using correlative Raman analysis after FIB modification of graphene are within reach using the correlative FIB-SEM- Raman microscope [3]. tion has placed on limitation on operation of the FIB, SEM or Raman microscope, thus FIB modification and SEM or Raman microscopic analysis of large samples e.g. 6 inch wavers is possible. Correlative Raman microscopy in-situ in the vacuum chamber is enabled and demonstrated on multiple samples in combination with both FIB and SEM. The combination of Raman chemical specificity with FIB and SEM, as part of the broader field of iCLEM, promises exciting new opportunities in both biological and materials sciences. References All references are available online: http://bit.ly/ IM-Timmermans Affiliations 1 Medical Cell Biophysics group, MIRA institute, University of Twente, Enschede, The Netherlands 2 NanoElectronics group, MESA+ institute, University of Twente, Enschede, The Netherlands 3 Transducers Science and Technology, MESA+ institute, University of Twente, Enschede, The Netherlands Contact Frank Timmermans Medical Cell Biophysics group MIRA institute University of Twente Enschede, The Netherlands f.j.timmermans@utwente.nl www.utwente.nl/tnw/mcbp/ Correlative Raman Analysis with FIB Ablation Raman spectroscopy is a promising tool for correlative analysis in combination with FIB sample modification. Using the FIB for material ablation enables micromachining of samples, by ablation of sample surface material with a high energy ion beam. This method potentially leaves the sample vulnerable for contamination through redeposition of removed material, and for sample damage, and molecular defects through ion penetration into the sample. Raman analysis of a FIB patterned sample is demonstrated on a silicon waver sample (fig. 4). The FIB is used to pattern an easily recognizable structure, which is subsequently analyzed with Raman microscopy. The analysis reveals changes in the 1 st order silicon crystal Raman band on regions where FIB patterning is performed. Rigorous analysis enables the detection of peak shifts and band broadening with 0.1 cm -1 accuracy. Further a broad Raman band at 450 cm -1 is indicative for amorphous and micro-crystalline silicon [4] which is accurately detected after FIB treatment. Conclusions The compact commercial Raman microscope is integrated as an add-on module to the FEI Nova Nanolab 600 FIB-SEM. The integra-
Page 1: VOLUME 18 MAY 2016 69721 2 Official
Page 4 and 5: Official Partner of the EMS Content
Page 6 and 7: NEWSTICKER High-Resolution Microsco
Page 8 and 9: EVENT CALENDAR APRIL HIGHLIGHT Ultr
Page 10 and 11: Annoucement EMC 2016: The City of L
Page 12 and 13: Announcement Fluorescence Lifetime
Page 14 and 15: RMS IN FOCUS In 2017 the mmc scient
Page 16 and 17: COVER STORY High-Throughput Confoca
Page 18 and 19: LIGHT MICROSCOPY Diffusion Measurem
Page 20 and 21: LIGHT MICROSCOPY 3891 [7]). ACF-cur
Page 22 and 23: LIGHT MICROSCOPY number of chromoph
Page 24 and 25: LIGHT MICROSCOPY Quality Control of
Page 26 and 27: LIGHT MICROSCOPY tively. Figures 2F
Page 28 and 29: LIGHT MICROSCOPY Observing the 3rd
Page 30 and 31: LIGHT MICROSCOPY For observation a
Page 32 and 33: SCANNING PROBE MICROSCOPY Fig. 2: (
Page 34 and 35: ELECTRON MICROSCOPY Integrated Rama
Page 38 and 39: ELECTRON MICROSCOPY Spectra of Elec
Page 40 and 41: ELECTRON MICROSCOPY Stemming Unwant
Page 42 and 43: ELECTRON MICROSCOPY Fig. 1: Princip
Page 44 and 45: ELECTRON MICROSCOPY Electro-Optical
Page 46 and 47: ELECTRON MICROSCOPY Fig. 3: Stereog
Page 48 and 49: Products USB 3.0 Range Expanded Jen
Page 50 and 51: Products Imaging Live Cells under N

SIM0216

Create successful ePaper yourself

Delete template?

Save as template?