Biennial Report 2016/2017
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Pilot-scale coating machine for advanced<br />
flexible gas-barrier films<br />
Development of cost-efficient flexible gas-barrier<br />
films for encapsulation of sensitive thin-film<br />
photovoltaics is currently a challenge facing industry<br />
when aiming on higher quota of renewable energy<br />
production. Recently, a photochemical process<br />
working at normal pressure and low temperature has<br />
been developed at IOM. The process involves UVinitiated<br />
conversion of a thin polysilazane layer into<br />
silica. A pilot-scale coating machine has been<br />
designed and constructed with the aim to further develop gas-barrier films and their production<br />
technology. The machine enables scale-up to wider substrates, demonstrations in true technical<br />
scale, and resilient economical evaluation of the production process.<br />
System for deterministic single ion<br />
implantation<br />
Deterministic ion implantation, i.e. the<br />
implantation of a pre-defined, counted number of<br />
single ions with a lateral accuracy of a few<br />
nanometers, is a promising technique to realize a<br />
functionalization of single atoms in a solid state<br />
material. In the framework of a collaborative project,<br />
the Leibniz Joint-Lab “Single Ion Implantation” of the<br />
IOM and the Nuclear Solid State Physics Department<br />
of Leipzig University was equipped with an advanced<br />
high resolution focused ion beam system containing a<br />
high precision laser interferometer stage for accurate<br />
and reproducible sample positioning. This development system has been equipped with an electron<br />
ion source and will be extended with a sophisticated single ion detector in order to fabricate quantum<br />
devices or sensors based on functionalized single atoms.
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