Biennial Report 2016/2017

White light interferometer microscope
White light interferometer microscopes are
standard tools for measurement of surface profiles
and roughness. The system is equipped with five
different objectives for magnifications from 2.5X up to
115X covering a wide range of lateral fields of view.
The microscope features non-contact techniques,
open-access sample loading, and intuitive analysis
software to characterize surface texture, finish,
roughness, curvature, slope, and numerous other
characteristics with angstrom-level accuracy.
High-resolution Raman spectrometer
The growth of thin films with tailored properties
and patterns on surfaces are major fields of work of
the institute. Optimizing the performance of the thin
films and structures requires the use of suitable
characterization techniques. Therefore, a highresolution
Raman spectrometer was installed, which
extends the portfolio of characterization techniques
and allows reseachers to determine thin film and
structural parameters that could not be accessed
before. The spectrometer is equipped with three
excitation lasers (λ = 473 nm, 532 nm, 632 nm), a high-resolution spectrograph (f = 800 mm), a
microscope (magnification 10 or 100), a polarization option, and a computer-controlled three-axes
translation stage. Thus, it allows researchers to characterize a large number of materials, thin films
or even monolayer films, structures of nm-size, and mapping of samples with a size of up to 75 mm
x 50 mm.