EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec

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EpiTT 488 Example: GaN/sapphire LED structure EpiTT 488nm ± 1nm AIX 2600G3 HT, 24x2“ • high frequency of oscillation • higher signal for nucleation as for 633nm signal • no drastic absorption data courtesy of AIXTRON AG 2 June 2008 Recent product improvements 22
EpiTT 488 UV-LED structure: simulation of EpiTT reflectance data at 488nm ± 1nm 5 � 244nm or 248nm UV Pump 50nm Al 0.55Ga 0.45N: Si- 5nm Al0.49Ga0.51N: ud or Si- 2.5nm Al0.36Ga0.64N: ud or Si- 5nm Al0.49Ga0.51N: ud or Si- 600nm Al 0.55Ga 0.45N: Si- 500nm AlN:ud HTBL 10nm AlN LTBL Single side polished c-plane Sapphire • relatively high frequency of oscillations • no observable absorption from Al 0.55GaN Al 0.55GaN 488nm ± 1nm 488nm: Optimal wavelength for UV-LED application! 2 June 2008 23 Recent product improvements
Page 1 and 2: Recent product improvements Dr. Kol
Page 3 and 4: EpiTT - experimental set-up EpiTT c
Page 5 and 6: EpiTT EpiTT - status until last mon
Page 7 and 8: Principle of pyrometry How does Pyr
Page 9 and 10: EpiTT EpiTT - status until last mon
Page 11 and 12: EpTT on 6x2“ CCS reactor GaN / Sa
Page 13 and 14: EpTT on 6x2“ CCS reactor EpiTT- L
Page 15 and 16: EpTT on 6x2“ CCS reactor GaN / Sa
Page 17 and 18: Outline Recent product improvements
Page 19 and 20: Reflectance EpiTT 488 0.6 0.5 0.4 0
Page 21: EpiTT 488 Example: AlInGaP optimum
Page 25 and 26: EpiTT / EpiCurve ® in HVPE Challen
Page 27 and 28: EpiTT / EpiCurve ® in HVPE High ti
Page 29 and 30: EpiCurve ® TT in HVPE Special EpiC
Page 31 and 32: EpiTT / EpiCurve ® in HVPE Challen
Page 33 and 34: EpiCurve ® TT EpiCurve ® TT stand
Page 35 and 36: New EpiCurve ® option Curve only s
Page 37 and 38: Outline Summary • EpiTT in CCS re

EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec

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