EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
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<strong>EpiTT</strong> / EpiCurve ® in HVPE<br />
Challenges of horizontal HVPE <strong>reactor</strong>s<br />
• high growth rate ( 10 ... 100 µm/h)<br />
• non-uni<strong>for</strong>m growth<br />
• sample wobble<br />
• long distance viewport-sample<br />
• high curvature values<br />
• convection effects due to "chimney effect"<br />
• gas foil rotation / no rotation trigger<br />
• reproducibility of sample position (tilt)<br />
• bad quality of optical window / no optical window<br />
2 June 2008 Recent product improvements<br />
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