EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
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<strong>EpiTT</strong> / EpiCurve ® in HVPE<br />
High time resolution mode <strong>for</strong> HVPE<br />
example:<br />
growth rate of 20 µm/h<br />
can be used <strong>for</strong>:<br />
• single wafer systems<br />
• with rotation trigger<br />
• <strong>for</strong> low wobble<br />
works up to a growth rate of 100 µm/h<br />
2 June 2008 Recent product improvements<br />
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