EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
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<strong>EpiTT</strong> / EpiCurve ® in HVPE<br />
Challenges of horizontal HVPE <strong>reactor</strong>s<br />
• high growth rate � new measurement mode<br />
• non-uni<strong>for</strong>m growth � 405nm measurement<br />
• sample wobble � big lens<br />
• long distance viewport-sample � special optics<br />
• high curvature values � special optics<br />
• convection effects � additional window<br />
• gas foil rotation / no rotation trigger<br />
• reproducibility of sample position (tilt)<br />
• bad quality of optical window / no optical window<br />
� <strong>reactor</strong> manufacturer<br />
2 June 2008 31<br />
Recent product improvements
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