EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec

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New EpiCurve ® option Curve only (without EpiTT) • only curvature measurement • no temperature, no reflectance measurement • can be applied in CCS reactors that do not have the "second" in-situ viewport (e.g. old standard lid) • can be applied on others reactors with very limited optical access • can be upgraded later to EpiCurve TT ... 2 June 2008 Recent product improvements 36
Outline Summary • EpiTT in CCS reactors - now available with LED light source 633/950nm - new wavelength: 405/950nm • EpiTT in AIXTRON reactors - new wavelength: 488nm • EpiTT and EpiCurve in horizontal HVPE systems - improved time resolution - ways towards an improved curvature performance • new EpiCurve option: "Curve only" 2 June 2008 Recent product improvements 37
Page 1 and 2: Recent product improvements Dr. Kol
Page 3 and 4: EpiTT - experimental set-up EpiTT c
Page 5 and 6: EpiTT EpiTT - status until last mon
Page 7 and 8: Principle of pyrometry How does Pyr
Page 9 and 10: EpiTT EpiTT - status until last mon
Page 11 and 12: EpTT on 6x2“ CCS reactor GaN / Sa
Page 13 and 14: EpTT on 6x2“ CCS reactor EpiTT- L
Page 15 and 16: EpTT on 6x2“ CCS reactor GaN / Sa
Page 17 and 18: Outline Recent product improvements
Page 19 and 20: Reflectance EpiTT 488 0.6 0.5 0.4 0
Page 21 and 22: EpiTT 488 Example: AlInGaP optimum
Page 23 and 24: EpiTT 488 UV-LED structure: simulat
Page 25 and 26: EpiTT / EpiCurve ® in HVPE Challen
Page 27 and 28: EpiTT / EpiCurve ® in HVPE High ti
Page 29 and 30: EpiCurve ® TT in HVPE Special EpiC
Page 31 and 32: EpiTT / EpiCurve ® in HVPE Challen
Page 33 and 34: EpiCurve ® TT EpiCurve ® TT stand
Page 35: New EpiCurve ® option Curve only s

EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec

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