EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
EpiTT / EpiCurve®TT LED-based for CCS reactor - Laytec
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EpiCurve ® TT standard set-up <strong>for</strong> <strong>CCS</strong><br />
<strong>EpiTT</strong><br />
optical<br />
heads<br />
EpiCurve ® TT<br />
Curve<br />
optical head<br />
PO5<br />
Requirement:<br />
two viewports on the<br />
same ring of wafer!<br />
Curve<br />
optical head<br />
PO4<br />
PO3<br />
PO2<br />
PO1<br />
ZONE A<br />
ZONE B<br />
<strong>EpiTT</strong><br />
optical head<br />
= special in-situ port<br />
(standard <strong>for</strong> new lids)<br />
2 June 2008 Recent product improvements<br />
34<br />
PO6
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