The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
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MLS-99-05-26.03<br />
mirror<br />
variable<br />
attenuator<br />
beamsplitter<br />
p = λ<br />
2 sinθ<br />
Interference Lithography<br />
beamsplitter<br />
spatial filters<br />
2θ<br />
Pockels cell<br />
substrate<br />
laser beam<br />
λ = 351.1 nm<br />
phase error<br />
sensor<br />
mirror