The Importance of Nanotechnology and Nanometrology for Space ...

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$Fabrication of Saw-tooth Diffraction Gratings using Nanoimprint ...$

MLS-2001-05-01.02.eps ~2 µm p max X-ray Reflection Grating Geometry 100 mm ~2˚ p min 200 mm pave ~2 µm Chirp ∆p/p ~5% Blaze ~2˚ Flatness
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