The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
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Filter.eps<br />
UV<br />
+<br />
Atoms<br />
Nan<strong>of</strong>ilter<br />
Grating<br />
Atoms<br />
Detector<br />
Nan<strong>of</strong>ilter UV-Blocking Transmission Gratings<br />
Electron micrograph <strong>of</strong> gold nan<strong>of</strong>ilter.<br />
45 nm<br />
UV Transmission Coefficient<br />
10 -1<br />
10 -3<br />
10 -5<br />
λ=121.6 nm<br />
(Hydrogen Lyman Alpha)<br />
10 -9<br />
10 -7<br />
30 nm gap width<br />
40 nm gap width<br />
50 nm gap width<br />
60 nm gap width<br />
0 100 200 300 400 500 600 700 800<br />
Thickness (nm)<br />
Electron micrograph <strong>of</strong> lines be<strong>for</strong>e electroplating.<br />
45 nm<br />
Resist<br />
IL<br />
ARC<br />
PB
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