The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
The Importance of Nanotechnology and Nanometrology for Space ...
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TAS-ail.eps<br />
Achromatic Interference Lithography<br />
resist-coated<br />
substrate<br />
λ=193 nm<br />
100 nm-period<br />
interference pattern<br />
micrometer<br />
phase grating<br />
(p = 200 nm)<br />
λ=193 nm (ArF excimer) can pattern 100 nm period (10,000 lines/mm)<br />
λ=157 nm (F 2 excimer) can pattern 80 nm period (12,000 lines/mm)
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