Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
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Magnetic Rotor Suspension<br />
with separate Frequency Converter<br />
with Compound Stage<br />
TURBOVAC MAG W 2000 C/CT<br />
Typical Applications<br />
- All major semiconductor processes<br />
such as Etch, CVD, PVD <strong>and</strong> Ion<br />
Implantation<br />
Technical Features<br />
- Active 5-axis <strong>mag</strong>netic bearing<br />
system<br />
- Patented KEPLA-COAT ® for rotor<br />
<strong>and</strong> stator to prevent corrosion<br />
- Low noise <strong>and</strong> vibration levels<br />
388<br />
303<br />
Ø 339<br />
Ø 335<br />
DN 250 ISO-F<br />
273<br />
Upper view “C”<br />
43°<br />
167<br />
32<br />
5<br />
197<br />
40°<br />
160<br />
- Installation in any orientation<br />
- Advanced rotor design for high<br />
pump speeds <strong>and</strong> forevacuum<br />
pressures<br />
- Integrated purge gas system<br />
47<br />
Forevacuum<br />
flange DN 40 KF<br />
35 38 67<br />
113<br />
- CT versions: Integrated temperature<br />
management system (TMS)<br />
Ø 199<br />
Cooling water IN<br />
Cooling water OUT<br />
Purge gas connector<br />
Drive Bearing connector<br />
38°<br />
42°<br />
Ø310<br />
197<br />
Upper view “CT”<br />
32<br />
5<br />
167<br />
43°<br />
R205<br />
Heater<br />
Advantages to the User<br />
- Maintenance-free<br />
40°<br />
Ø<br />
- High throughput for all etch gases<br />
11<br />
160<br />
113<br />
- High pumping speed at low<br />
pressure<br />
11x30°<br />
Dimensional drawing for the TURBOVAC MAG W 2000 C/CT<br />
10000<br />
I x s -1<br />
Pumping Speed<br />
1000<br />
100<br />
38°<br />
- High foreline pressure tolerance:<br />
up to 5.3 mbar (4 Torr)<br />
- High resistance against corrosive<br />
gases<br />
- Robust against particles <strong>and</strong> deposits<br />
- Temperature management system<br />
(TMS) to avoid condensation<br />
- Application specific design<br />
10<br />
8<br />
6<br />
4<br />
N2<br />
He<br />
H2<br />
2<br />
1<br />
10 -4<br />
2 4 6 8<br />
10 -3 10 -2 10 -1 mbar<br />
Inlet Pressure<br />
10<br />
Pumping speed of the TURBOVAC MAG W 2000 CT (DN 250) as a function of the inlet pressure<br />
C09 102<br />
Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog
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