Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
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Technical Data TURBOVAC SL 80<br />
Inlet flange<br />
Foreline flange<br />
Purge <strong>and</strong> vent port<br />
DN<br />
DN<br />
Pump housing<br />
Pumping speed (without inlet screen)<br />
N 2 I x s -1<br />
Ar I x s -1<br />
H 2 I x s -1<br />
He I x s -1<br />
Max. gas throughput with water cooling<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
H 2 mbar x I x s -1<br />
He mbar x I x s -1<br />
Ultimate pressure for CF version<br />
with two-stage oil-sealed<br />
rotary vane vacuum pump mbar (Torr)<br />
O-ring sealed<br />
DN 16 KF<br />
Aluminum<br />
63 ISO-K • 63 CF<br />
M 8<br />
65<br />
60<br />
49<br />
55<br />
2.0<br />
1.6<br />
0.5<br />
1.2<br />
< 2 x 10 -10 (< 1.5 x 10 -10 )<br />
Metal sealed<br />
Stainless steel<br />
Max. recommended foreline pressure for N 2<br />
water-cooled<br />
mbar (Torr)<br />
Recommended forevacuum pump<br />
two-stage oil-sealed<br />
rotary vane vacuum pump<br />
with scroll vacuum pump<br />
diaphragm pump<br />
Operating speed min -1<br />
Run-up time<br />
min<br />
Power consumption<br />
at run-up<br />
W<br />
at ultimate pressure<br />
W<br />
Protection class<br />
IP<br />
Noise level<br />
dB(A)<br />
Ambient temperature<br />
during operation<br />
°C (°F)<br />
during storage<br />
°C (°F)<br />
Weight, approx.<br />
Pump<br />
kg (lbs)<br />
Pump with TURBO.DRIVE kg (lbs)<br />
Pump with TURBO.DRIVE<br />
<strong>and</strong> air-cooling<br />
kg (lbs)<br />
<strong>and</strong> water-cooling<br />
kg (lbs)<br />
Max. rel. atmospheric humidity, approx. %<br />
20 (15)<br />
TRIVAC D 2,5 E / TRIVAC NT 5<br />
SCROLLVAC SC 5 D / 15 D<br />
DIVAC 0.8 T<br />
72.000<br />
1.5<br />
120<br />
17<br />
20<br />
< 46<br />
+15 to +45 (+50 to +113)<br />
-15 to +70 (-5 to +158)<br />
1.9 (4.19) 3.1 (6.84)<br />
2.5 (5.52) 3.7 (8.17)<br />
2.8 (6.18) 4.0 (8.83)<br />
3.1 (6.84) 4.3 (9.49)<br />
95 (non-condensing)<br />
Technical Data TURBO.DRIVE TD 400<br />
Power supply<br />
V DC<br />
Ripple %<br />
Output<br />
Voltage, 3 phase<br />
V DC<br />
Power<br />
W<br />
Frequency<br />
Hz<br />
Ambient temperature<br />
during operation<br />
°C (°F)<br />
during storage<br />
°C (°F)<br />
Weight, approx.<br />
kg (lbs)<br />
Serial interface<br />
24 ±10 %<br />
< 3<br />
0 to 24<br />
160<br />
0 to 1500<br />
+5 to +45 (+41 to +113)<br />
-15 to +70 (-5 to +158)<br />
0.7 (1.55)<br />
RS 232 C, RS 485 C or Profibus<br />
Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog<br />
41<br />
C09
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