Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
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Technical Data TURBOVAC SL 700<br />
Inlet flange<br />
Foreline flange<br />
Purge <strong>and</strong> vent port<br />
DN<br />
DN<br />
Pump housing<br />
Pumping speed (without inlet screen)<br />
N 2 I x s -1<br />
Ar I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Max. gas throughput with water cooling<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
He mbar x I x s -1<br />
H 2 mbar x I x s -1<br />
Ultimate pressure for CF version<br />
with two-stage oil-sealed<br />
rotary vane vacuum pump mbar (Torr)<br />
Max. recommended foreline pressure for N 2<br />
water-cooled<br />
mbar (Torr)<br />
Recommended forevacuum pump<br />
two-stage oil-sealed<br />
rotary vane vacuum pump<br />
Scroll-Vakuumpumpe<br />
Operating speed min -1<br />
Run-up time, approx.<br />
min<br />
Power consumption<br />
at run-up<br />
W<br />
at ultimate pressure<br />
W<br />
Protection class<br />
IP<br />
Noise level<br />
dB(A)<br />
Ambient temperature<br />
during operation<br />
°C (°F)<br />
at st<strong>and</strong>still<br />
°C (°F)<br />
Weight, approx.<br />
Pump<br />
kg (lbs)<br />
Pump with TURBO.DRIVE kg (lbs)<br />
Pump with TURBO.DRIVE<br />
<strong>and</strong> air-cooling<br />
kg (lbs)<br />
<strong>and</strong> water-cooling<br />
kg (lbs)<br />
Max. rel. atmospheric humidity, approx. %<br />
O-ring sealed<br />
Aluminum<br />
160 ISO-K • 160 CF<br />
DN 25 KF<br />
M 8<br />
690<br />
630<br />
580<br />
360<br />
Metal sealed<br />
Stainless steel<br />
5.6 Upon request<br />
4.6 Upon request<br />
2.0 Upon request<br />
0.9 Upon request<br />
< 10 -9 (< 10 -9 )<br />
15 (11.3)<br />
TRIVAC NT 10 / 16<br />
SCROLLVAC SC 15 / 30 D<br />
48.000<br />
5<br />
270<br />
60<br />
20<br />
< 47<br />
+10 to +45 (+50 to +113)<br />
-15 to +60 (-5 to +140)<br />
-15 to +60 (-5 to +140) 17.3 (38.19)<br />
14.8 (32.67) 18.1 (39.96)<br />
16.0 (35.32) 19.3 (42.60)<br />
15.1 (33.33) 18.4 (40.62)<br />
5 to 85 (non-condensing)<br />
Technical Data TURBO.DRIVE TD 700<br />
Power supply<br />
V DC<br />
Ripple %<br />
Output<br />
Voltage, 3 phase<br />
V DC<br />
Power<br />
W<br />
Frequency<br />
Hz<br />
Ambient temperature<br />
during operation<br />
°C (°F)<br />
during storage<br />
°C (°F)<br />
Weight, approx.<br />
kg (lbs)<br />
Serial interface<br />
24 ±10 %<br />
< 3<br />
0 to 24<br />
160<br />
0 to 1500<br />
+10 to +45 (+50 to +113)<br />
-15 to +60 (-5 to +140)<br />
0.7 (1.55)<br />
RS 232 C, RS 485 C or Profibus<br />
Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog<br />
49<br />
C09
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