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Turbovac and mag - Ideal Vacuum Products

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Technical Data<br />

TURBOVAC 1100 C<br />

Inlet flange<br />

DN<br />

160 ISO-K 200 ISO-K 250 ISO-K<br />

Pumping speed<br />

N 2 I x s -1<br />

Ar I x s -1<br />

He I x s -1<br />

H 2 I x s -1<br />

Max. gas throughput<br />

N 2 mbar x I x s -1<br />

Ar mbar x I x s -1<br />

Compression ratio<br />

N 2<br />

Ar<br />

H 2<br />

710 830 1050<br />

– 760 980<br />

– 750 850<br />

– 600 630<br />

6.5 6.5 6.5<br />

6.5 6.5 6.5<br />

1 x 10 5 1 x 10 5 1 x 10 5<br />

1 x 10 5 1 x 10 5 1 x 10 5<br />

1 x 10 4 1 x 10 4 1 x 10 4<br />

Ultimate pressure<br />

Max. foreline pressure for N 2<br />

mbar (Torr)<br />

mbar (Torr)<br />

< 3 x 10 -10 (< 2.2 x 10 -10 ) < 3 x 10 -10 (< 2.2 x 10 -10 ) < 3 x 10 -10 (< 2.2 x 10 -10 )<br />

0.1 (0.075) 0.1 (0.075) 0.1 (0.075)<br />

Recommended forevacuum pump<br />

Run-up time<br />

at 95% of nominal speed<br />

Purge / vent port<br />

Cooling water connection<br />

(hose nozzles)<br />

Weight, approx.<br />

Supply voltage<br />

Max. power consumption<br />

min<br />

DN<br />

mm (in.)<br />

kg (lbs)<br />

V AC<br />

VA<br />

TRIVAC D 65 B / TRIVAC D 65 B / TRIVAC D 65 B /<br />

SCROLLVAC SC 15/30 D SCROLLVAC SC 15/30 D SCROLLVAC SC 15/30 D<br />

9 9 9<br />

10 KF 10 KF 10 KF<br />

10 (0.39) 10 (0.39) 10 (0.39)<br />

22 (48) 22 (48) 22 (48)<br />

42 42 42<br />

400 400 400<br />

Technical Data<br />

TURBO.DRIVE TD 20 classic<br />

Mains connection, 50 - 60 Hz; selectable<br />

Max. output voltage<br />

Overload current limit<br />

V<br />

V<br />

A<br />

100 to 240 (-15 % / +10 %)<br />

3 x 47<br />

5<br />

Permissible ambient temperature<br />

Protection class<br />

Dimensions (W x H x D)<br />

Weight, approx.<br />

°C (°F)<br />

IP<br />

mm<br />

(in.)<br />

kg (lbs)<br />

0 to +45 (+32 to +113)<br />

20<br />

213 x 128 x 315 (1/2 19", 3 HU)<br />

8.39 x 5.04 x 12.40 (1/2 19", 3 HU)<br />

4 (8.8)<br />

Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog<br />

33<br />

C09

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