Turbovac and mag - Ideal Vacuum Products

Mechanical Rotor Suspension
without Compound-Stufe
TURBOVAC 361, 361 C
ClassicLine
Turbomolecular pumps without a
purge gas facility are only suited for
pumping of air or inert gases.
They are not suited for pumping of
aggressive or reactive gases.
TURBOVAC pumps with a “C” in the
type designation are equipped with a
purge gas facility.
The purge gas protects only the
bearing area and the motor of the
TURBOVAC.
a a
60°
C
C
ød
h
30°
D
E
h 3 B
B
h 4
Dimensional drawing for the TURBOVAC 361 and 361 C
Top view
20°
361 361 C
DN h h h 1 h 2 h 3 h 4 a b d 1 l
100 ISO-K mm 254 254 88 47 135 84 98 94 10 166
in. 10 10 3.46 1.85 5.31 3.31 3.86 3.70 0.39 6.54
100 CF mm 268 – – 47 135 84 98 94 10 166
in. 10.55 – – 1.85 5.31 3.31 3.86 3.70 0.39 6.54
160 ISO-K mm 227 227 88 47 135 84 98 94 10 166
in. 8.94 8.94 3.46 1.85 5.31 3.31 3.86 3.70 0.39 6.54
160 CF mm 226 – – 47 135 84 98 94 10 166
in. 8.90 – – 1.85 5.31 3.31 3.86 3.70 0.39 6.54
1000
500
a
DN
A
h 2
h 1
10 -6 10 -5 10 -4 10 -3 10 -2 Torr
D
F
E
l
ød 1
750
500
cfm
b
Typical Applications
- Leak detectors
- Mass spectrometers
- Data storage
- Optical coating
- R & D
- UHV systems
- Particle accelerators
- Load locks and transfer chambers
Technical Features
- Small footprint
- Installation in any orientation
- Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
- Bearing temperature measurement
through the TURBO.DRIVE
TD 20 classic
Pumping speed
200
100
100
50
Advantages to the User
- Space-saving
10
- Easy to integrate into complex
vacuum systems
I x s -1 10 -5 10 -4 10 -3 10 -2 10 -1
10
10 -6 2 4 6 8
N2
Ar
He
Intake Pressure
mbar
- Low operating costs
- Highly reliable operation also in
processes loaded with particles
H2
Pumping speed as a function of the inlet pressure (TURBOVAC 361 with flange DN 100)
C09 20
Oerlikon Leybold Vacuum Full Line Catalog